Electron emitter formed of a dielectric material characterized by having high mechanical quality factor
First Claim
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1. An electron emitter comprisingan emitter section formed of a thin layer of a dielectric material containing PMN-PT-PZ and having a mechanical quality factor of more than 100;
- a first electrode provided on a front surface of the emitter section; and
a second electrode provided on the front surface of the emitter section, or on a reverse surface of the emitter section opposite the front surface.
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Abstract
A dielectric-film-type electron emitter includes an emitter section, a first electrode, and a second electrode. The emitter section is formed of a thin layer of a polycrystalline dielectric material. The dielectric material constituting the emitter section is formed of a material having high mechanical quality factor (Qm). Specifically, the dielectric material has a Qm higher than that of a so-called low-Qm material (a material having a Qm of 100 or less). The Qm of the dielectric material is preferably 300 or more, more preferably 500 or more.
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Citations
7 Claims
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1. An electron emitter comprising
an emitter section formed of a thin layer of a dielectric material containing PMN-PT-PZ and having a mechanical quality factor of more than 100; -
a first electrode provided on a front surface of the emitter section; and a second electrode provided on the front surface of the emitter section, or on a reverse surface of the emitter section opposite the front surface.
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2. An electron emitter as described in claim 1, wherein a gap is formed between a peripheral portion of the first electrode and the front surface of the emitter section.
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3. An electron emitter as described in claim 2, the electron emitter further comprising a substrate which is provided on the reverse surface side of the emitter section and which supports the emitter section, wherein the emitter section is bonded onto a surface of the substrate.
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4. An electron emitter as described in claim 3, wherein the second electrode is bonded onto the surface of the substrate, and the emitter section is bonded onto the second electrode.
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5. An electron emitter as described in claim 1, the electron emitter further comprising a substrate which is provided on the reverse surface side of the emitter section and which supports the emitter section, wherein the emitter section is bonded onto a surface of the substrate.
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6. An electron emitter as described in claim 5, wherein the second electrode is bonded onto the surface of the substrate, and the emitter section is bonded onto the second electrode.
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7. An electron emitter as described in claim 1, wherein the dielectric material does not contain Bi.
Specification