Embedded piezoelectric microcantilever sensors
First Claim
1. A microcantilever sensor, comprising:
- a first substrate having an edge;
a polymeric sensing material disposed on a surface of a substrate, said polymeric sensing material capable of a volumetric change when brought into contact with an analyte;
a deflectable arm formed integrally with the first substrate, said arm having a first end fixedly coupled to the first substrate, a second end at least partially embedded in said polymeric sensing material and capable of deflecting responsive to a volumetric change of the polymeric sensing material, and an overhang portion extending beyond the substrate edge; and
a detecting element which creates a detectable signal in response to the deflection of said arm.
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Abstract
An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.
27 Citations
12 Claims
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1. A microcantilever sensor, comprising:
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a first substrate having an edge; a polymeric sensing material disposed on a surface of a substrate, said polymeric sensing material capable of a volumetric change when brought into contact with an analyte; a deflectable arm formed integrally with the first substrate, said arm having a first end fixedly coupled to the first substrate, a second end at least partially embedded in said polymeric sensing material and capable of deflecting responsive to a volumetric change of the polymeric sensing material, and an overhang portion extending beyond the substrate edge; and a detecting element which creates a detectable signal in response to the deflection of said arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification