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Force or pressure sensor and method for applying the same

  • US 7,726,209 B2
  • Filed: 08/15/2003
  • Issued: 06/01/2010
  • Est. Priority Date: 08/21/2002
  • Status: Expired due to Fees
First Claim
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1. A force or pressure sensor, comprising:

  • a substantially rigid, mechanical-load resistant frame,a flexible diaphragm having an user and a lower surface, said flexible diaphragm being secured to the frame, anda piezoelectric ceramic sensor diaphragm applied to the lower surface of the flexible diaphragm, anda substantially rigid cover for loading the sensor diaphragm and capable of carrying mechanical loading of more than 50 kg, wherein the cover includes a protrusion or shoulder bearing against a middle section of the upper surface of the flexible diaphragm and thus, by deflection, prestressing the flexible diaphragm and the piezoelectric ceramic sensor diaphragm attached therebelow,a sensor-signal transmitting conductor disposed in contact with the piezoelectric ceramic sensor diaphragm opposite to a location of the cover protrusion or shoulder bearing against the middle section of the upper surface of the flexible diaphragm, andwherein the frame and the cover define therebetween a closed housing chamber, the flexible diaphragm and the piezoelectric ceramic sensor diaphragm being located thereinside,wherein the flexible diaphragm has a peripheral rim extending between mating edges of the frame and the cover such that the peripheral rim is fixedly secured therebetween,wherein the piezoelectric ceramic sensor diaphragm comprises a piezoceramic diaphragm having a diameter smaller than a diameter of the flexible diaphragm such that the piezoceramic sensor diaphragm has a peripheral rim spaced inwardly a distance from an inner periphery of the housing chamber,wherein the frame, the cover and the diaphragms are rotationally symmetrical relative to the cover protrusion or shoulder.

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