Varactor design using area to perimeter ratio for improved tuning range

• US 7,728,377 B2
• Filed: 08/28/2006
• Issued: 06/01/2010
• Est. Priority Date: 09/23/2005
• Status: Active Grant

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: Agile RF Incorporated
• Inventors: Elsass, Christopher R., York, Robert Armstrong
• Primary Examiner(s): Louie; Wai-Sing
• Assistant Examiner(s): Jahan; Bilkis
• Application Number:
  US11/511,568
• Publication Number:
  US 20070069274A1
• Time in Patent Office: 1,373 Days
• Field of Search: 257/312, 257/595, 257/E27.049, 257/E29.344
• US Class Current: 257/312
• CPC Class Codes: H01G 7/06 having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors electrets H01G7/02
• CPC Class Codes: H01L 28/55 with a dielectric comprising a perovskite structure material
• CPC Class Codes: H01L 28/65 comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)

Abstract

Parallel plate tunable varactors having a bulk capacitance contribution to a total capacitance increased compared to a fringing capacitance contribution are disclosed. The contribution of the bulk capacitance to the total capacitance of an exemplary BST varactor is increased by increasing the area/perimeter ratio of the active region, thereby improving the tunability and other properties of the varactor. In an exemplary embodiment, an active region of the varactor has a lateral shape with a perimeter that is less than a perimeter of an equivalent area square. In various exemplary embodiments, the shape of the active region may be substantially circular or substantially octagonal. Methods for fabricating and designing such varactors are also disclosed.

Claims

1. A parallel plate tunable varactor, the varactor comprising:

a first electrode;

a second electrode;

a thin film dielectric layer between the first electrode and the second electrode, wherein the first electrode, the second electrode, and the dielectric layer are integrated on a substrate, and a permittivity of the dielectric layer varies according to a DC bias applied between the first electrode and the second electrode; and

an active region defined by an overlap of the first electrode, the second electrode, and the dielectric layer, the active region having a lateral shape, wherein a perimeter of the lateral shape is less than a perimeter of an equivalent square having a same area as the lateral shape, and a ratio of an area of the lateral shape to the perimeter of the lateral shape is not less than four micrometers.

2. The varactor of claim 1, wherein the thin film dielectric layer comprises at least one of the materials selected from a group consisting of:

barium titanate (BT), strontium titanate (SI), and barium strontium titanate (BST).

3. The varactor of claim 1, wherein at least one of the electrodes comprises platinum.

4. The varactor of claim 1, wherein the perimeter of the lateral shape is at least 39% less than the perimeter of the equivalent square.

5. The varactor of claim 1, wherein the perimeter of the lateral shape is at least 8% less than the perimeter of the equivalent square.

6. The varactor of claim 1, wherein the lateral shape is a polygon with at least five sides.

7. The varactor of claim 6, wherein the lateral shape is an octagon.

8. The varactor of claim 6, wherein the lateral shape is a heptagon, a hexagon, or a pentagon.

9. The varactor of claim 1, wherein the lateral shape is a polygon with at least eight sides.

10. The varactor of claim 1, wherein the first electrode is a top electrode and the active region is defined by the top electrode.

11. The varactor of claim 1, wherein fringe capacitance comprises at least 5% of a total capacitance of the varactor.

12. The varactor of claim 1, wherein fringe capacitance comprises at least boo of a total capacitance of the varactor.

13. The varactor of claim 1, wherein fringe capacitance comprises at least 15% of a total capacitance of the varactor.

14. The varactor of claim 1, wherein fringe capacitance comprises at least 25% a total capacitance of the varactor.

15. The varactor of claim 1, wherein each one of a plurality of corners defining the lateral shape is rounded.