Ultrasound transducer manufactured by using micromachining process, its device, endoscopic ultrasound diagnosis system thereof, and method for controlling the same
First Claim
1. An ultrasound transducer device manufactured by using a micromachining process having an ultrasound transducer comprising:
- a first electrode into which a control signal for transmitting ultrasound is input;
a substrate on which the first electrode is formed;
a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes;
a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when voltage is applied between the first and second electrodes;
a first piezoelectric film formed on the second electrode formed on a surface of the membrane; and
a third electrode that is connected to the first piezoelectric film and faces the second electrode via the piezoelectric film, said ultrasound transducer device comprising;
a conversion unit boosting an alternating current low voltage signal conveyed from a conveying cable, and converting it into a direct current voltage signal;
a first switching unit switching an electrical connection between the conversion unit and the first electrode;
a self oscillating unit performing self oscillation on the basis of the direct current voltage signal input into the first electrode in order to drive the ultrasound transducer to transmit ultrasound;
a reception signal processing unit performing a prescribed signal process on a reception signal created on the basis of the ultrasound received by the ultrasound transducer; and
a second switching unit switching an electrical connection between the conversion unit and the reception signal processing unit.
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Accused Products
Abstract
An ultrasound transducer manufactured by using a micromachining process comprises: a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes; a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when a voltage is applied between the first and second electrodes; a piezoelectric film contacting the membrane; and a third electrode electrically continuous to the piezoelectric film.
52 Citations
19 Claims
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1. An ultrasound transducer device manufactured by using a micromachining process having an ultrasound transducer comprising:
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a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes; a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when voltage is applied between the first and second electrodes; a first piezoelectric film formed on the second electrode formed on a surface of the membrane; and a third electrode that is connected to the first piezoelectric film and faces the second electrode via the piezoelectric film, said ultrasound transducer device comprising; a conversion unit boosting an alternating current low voltage signal conveyed from a conveying cable, and converting it into a direct current voltage signal; a first switching unit switching an electrical connection between the conversion unit and the first electrode; a self oscillating unit performing self oscillation on the basis of the direct current voltage signal input into the first electrode in order to drive the ultrasound transducer to transmit ultrasound; a reception signal processing unit performing a prescribed signal process on a reception signal created on the basis of the ultrasound received by the ultrasound transducer; and a second switching unit switching an electrical connection between the conversion unit and the reception signal processing unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of controlling an ultrasound transducer device manufactured by using a micromachining process, comprising:
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an ultrasound transducer including; a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes; a membrane on which the second electrode is formed and which vibrates and generates ultrasound when voltage is applied between the first and second electrodes; a first piezoelectric film formed on the second electrode formed on a surface of the membrane; and a third electrode connected to the first piezoelectric film and facing the second electrode via the piezoelectric film; and a conversion unit boosting an alternating current low-voltage signal conveyed from a conveying cable, and converting it into a direct current voltage signal; a first switching unit switching an electrical connection between the conversion unit and the first electrode; a self oscillating unit performing self-oscillation on the basis of the direct current voltage signal input into the first electrode in order to drive the ultrasound transducer to transmit ultrasound; a reception signal processing unit performing a prescribed signal process on a reception signal created on the basis of the ultrasound received by the ultrasound transducer; and a second switching unit switching an electrical connection between the conversion unit and the reception signal processing unit, wherein; when transmitting ultrasound, the first switching unit is turned on and the second switching unit is turned off; an alternating current voltage signal for controlling vibration of the membrane is boosted by the conversion unit in order to convert it into a direct current voltage signal; the direct current voltage signal is supplied to the self oscillating unit via the first switching unit; and ultrasound is transmitted from the ultrasound vibration on the basis of the self oscillating unit. - View Dependent Claims (19)
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Specification