Test head positioning system and method

• US 7,728,579 B2
• Filed: 05/17/2007
• Issued: 06/01/2010
• Est. Priority Date: 03/31/2003
• Status: Active Grant

• Current Assignee: inTEST Corporation
• Original Assignee: inTEST Corporation
• Inventors: Mueller, Christian
• Primary Examiner(s): PATEL, PARESH H
• Application Number:
  US11/749,988
• Publication Number:
  US 20080122432A1
• Time in Patent Office: 1,111 Days
• Field of Search: None
• US Class Current: 324/750.25
• CPC Class Codes: G01R 31/2887 involving moving the probe head or the IC under test; docking stations moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05

Abstract

An apparatus for supporting a load includes pneumatic units and couplers coupled to opposite sides of the load. The couplers move the load parallel to a first axis responsive to actuation of the pneumatic units. At least one of the couplers rotate the load about a second axis orthogonal to the first axis. The load is compliant along the first axis and about the second axis At least one of the pneumatic units provides compliance along the first axis and about the second axis.

Claims

1. Apparatus for supporting a load, comprising:

a plurality of pneumatic units;

a plurality of couplers coupled to opposite sides of said load, said couplers moving to different locations in order to move said load parallel to a first axis responsive to actuation of said plurality of pneumatic units, at least one of said couplers rotating said load about a second axis orthogonal to said first axis by moving one of said couplers to a different location, said load compliant along said first axis and about said second axis, at least one of said pneumatic units provides compliance along said first axis and about said second axis.

2. Apparatus for supporting a load according to claim 1, further comprising a swing plate for moving said load about said first axis.

3. Apparatus for supporting a load according to claim 1, wherein when said load moves about said second axis, said one of said couplers moves in one direction while either:

a) another of said couplers moves in an opposite direction;

or

b) said another of said couplers remains stationary.

4. Apparatus for supporting a load according to claim 1, further comprising an in-out plate, for moving said load parallel to said second axis.

5. Apparatus for supporting a load according to claim 1, further comprising a side to side plate for moving said load along a third axis orthogonal to both said first axis and said second axis.

6. Apparatus for supporting a load according to claim 1, wherein said couplers rotate said load about a third axis orthogonal to said second axis.

7. Apparatus for supporting a load according to claim 1, wherein said load is compliant about said second axis independent of whether said second axis is at a center of gravity of said load.

8. Apparatus for supporting a load according to claim 1, wherein each of said pneumatic units are individually regulated.

9. Apparatus for supporting a load according to claim 1, further comprising a plurality of actuators for moving said pneumatic units to respective first positions, said pneumatic units facilitate movement of said load to a final position.

10. Apparatus for supporting a load, comprising:

a plurality of pneumatic units;

a plurality of couplers coupling said pneumatic units to said load at opposite sides thereof, said couplers moving to different locations in order to move said load parallel to a first axis, at least one of said couplers rotating said load about a second axis orthogonal to said first axis by moving one of said couplers to a different location, said pneumatic units providing compliance in at least two degrees of freedom.

11. Apparatus for supporting a load according to claim 10, further comprising a plurality of actuators for moving said load along said first axis, at least one of said couplers moving said load about said second axis responsive to actuation of at least one of said actuators, said pneumatic units causing said load to be compliant along said first axis and about said second axis.

12. Apparatus for supporting a load according to claim 11, further comprising a swing plate for moving said load about said first axis.

13. Apparatus for supporting a load according to claim 11, wherein when said load moves about said second axis, said one of said couplers moves in one direction while either:

a) another of said couplers moves in an opposite direction;

or

b) another of said couplers remains stationary.

14. Apparatus for supporting a load according to claim 11, further comprising an in-out plate, for moving said load parallel to said second axis.

15. Apparatus for supporting a load according to claim 11, further comprising a side to side plate for moving said load along a third axis orthogonal to said second axis.

16. Apparatus for supporting a load according to claim 11, wherein said couplers rotate said load about a third axis orthogonal to said first and second axis.

17. Apparatus for supporting a load, comprising:

a plurality of couplers coupled to said load at opposite sides thereof, at least one of said couplers power driven for rotating said load about a rotation axis, said at least one couplers including an attachment unit having a flexible element for providing compliance about said rotation axis, said couplers moving to different locations in order to move said load parallel to a first axis, at least one of said couplers rotating said load about a second axis orthogonal to said first axis by moving one of said couplers to a different location.

18. Apparatus for supporting a load according to claim 17, wherein said couplers move said load along said first axis orthogonal to said rotation axis and about said second axis orthogonal to both said first axis and said rotation axis.

19. Apparatus for supporting a load according to claim 18, wherein said load is compliant along said first axis and about said second axis.

20. Apparatus for supporting a load according to claim 18, wherein when said load moves about said second axis, said one of said couplers moves in one direction while either:

a) another of said couplers moves in an opposite direction;

or

b) another of said couplers remains stationary.

21. Apparatus for supporting a load according to claim 18, further comprising an in-out plate, for moving said load along said second axis.

22. Apparatus for supporting a load according to claim 18, further comprising a side to side plate for moving said load along said rotating axis which is orthogonal to said second axis.

23. Apparatus for supporting a load according to claim 17, wherein said flexible element comprises rubber.

24. Apparatus for supporting a load according to claim 17, wherein said flexible element is coupled to a power driven gear.

25. Apparatus for supporting a load according to claim 17, wherein said one of said coupler is power driven from a source selected from the group consisting of electricity and pneumatic.

26. A method of supporting a load, comprising:

actuating a plurality of spaced apart actuators so that couplers move to different locations in order to move said load parallel to a first axis,

rotating said load about a second axis orthogonal to said first axis by actuating one of said actuators in order to move one of said couplers to a different location,

providing compliant freedom along said first axis; and

providing compliant freedom about said second axis orthogonal to the first axis.

27. A method of supporting a load according to claim 26, wherein when said load moves about said second axis, one of said actuators moves in one direction while either:

a) another one of said actuators moves in an opposite direction, or

b) said another one of said actuators remains stationary.

28. A method of supporting a load according to claim 26, further comprising the step of moving said load parallel to said second axis.

29. A method of supporting a load according to claim 26, further comprising the step of moving said load along a third axis orthogonal to both said first axis and said second axis.

30. A method of supporting a load according to claim 26, further comprising the step of rotating said load about a third axis orthogonal to said second axis.

31. A method of supporting a load according to claim 26, further comprising the step of regulating at least one pneumatic unit to provide compliant freedom.

32. A method of supporting a load according to claim 31 wherein said one pneumatic unit is one of a plurality of pneumatic units that are individually regulated to provide said compliant freedom.

33. A method of supporting a load according to claim 31, wherein said actuators move said at least one pneumatic unit to a first position, and said pneumatic unit facilitates movement of said load to a final position.