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Reflective loop system producing incoherent radiation

  • US 7,728,954 B2
  • Filed: 06/06/2006
  • Issued: 06/01/2010
  • Est. Priority Date: 06/06/2006
  • Status: Active Grant
First Claim
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1. A system, comprising:

  • a source of radiation that produces a coherent or partially coherent beam; and

    a reflective loop system comprising a reflective device comprising at least one opening,wherein the reflective device is configured to reflect the coherent or partially coherent beam through one or more loops, each of the loops comprising four reflections, to form a more incoherent beam,wherein the beam enters or exits the reflective loop system through the at least one opening, andwherein the reflective loop system includes a field plane and a pupil plane.

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