Lithographic apparatus, radiation supply and device manufacturing method
First Claim
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1. A lithographic apparatus, comprising:
- a radiation beam divider configured to divide a pulsed beam of radiation into at least first and second pulsed sub-beams of radiation;
at least one sensor, configured to determine a radiation dose of a pulse of radiation in the pulsed beam of radiation or at least one of the pulsed first and second sub-beams of radiation;
an optical delay component, configured to delay a pulse of radiation after the radiation dose of the pulse of radiation has been determined by said at least one sensor;
a first modulator, configured to adjust a radiation dose of a pulse of radiation in said first pulsed sub-beam of radiation based on the radiation dose determined by the at least one sensor;
a second modulator, configured to adjust a radiation dose of a pulse of radiation in said second pulsed sub-beam of radiation based on the radiation dose determined by said at least one sensor; and
one or more radiation sinks, configured to absorb excess radiation directed from at least one of the first or second modulator.
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Abstract
A system for controlling the radiation dose in a pulse of radiation having a relatively large dose, in which a pulsed beam of radiation is divided into a plurality of pulsed sub-beams of radiation and the radiation dose of the pulses is adjusted after the radiation beam has been divided.
21 Citations
21 Claims
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1. A lithographic apparatus, comprising:
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a radiation beam divider configured to divide a pulsed beam of radiation into at least first and second pulsed sub-beams of radiation; at least one sensor, configured to determine a radiation dose of a pulse of radiation in the pulsed beam of radiation or at least one of the pulsed first and second sub-beams of radiation; an optical delay component, configured to delay a pulse of radiation after the radiation dose of the pulse of radiation has been determined by said at least one sensor; a first modulator, configured to adjust a radiation dose of a pulse of radiation in said first pulsed sub-beam of radiation based on the radiation dose determined by the at least one sensor; a second modulator, configured to adjust a radiation dose of a pulse of radiation in said second pulsed sub-beam of radiation based on the radiation dose determined by said at least one sensor; and one or more radiation sinks, configured to absorb excess radiation directed from at least one of the first or second modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A device manufacturing method, comprising:
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dividing a pulsed beam of radiation into at least first and second pulsed sub-beams of radiation; determining a radiation dose of at least one pulse of radiation of said pulsed beam of radiation or at least one of said first and second pulsed sub-beams of radiation; delaying said pulse of radiation in an optical delay component after the radiation dose of the pulse of radiation has been determined; adjusting a radiation dose of a pulse of radiation in said first pulsed sub-beam of radiation based on said determined radiation dose of said at least one pulse of radiation; and adjusting a radiation dose of a pulse of radiation in said second pulsed sub-beam of radiation based on said determined radiation dose of said at least one pulse of radiation, wherein at least one of the adjusting steps comprises absorbing excess radiation in a radiation sink. - View Dependent Claims (19, 20)
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21. A radiation supply system, comprising:
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a radiation beam divider configured to divide a pulsed beam of radiation into at least first and second pulsed sub-beams of radiation; at least one sensor, configured to determine a radiation dose within a pulse of radiation in the pulsed beam of radiation or at least one of the first and second pulsed sub-beams of radiation; an optical delay component, configured to delay a pulse of radiation after the radiation dose of the pulse of radiation has been determined by the sensor; a first modulator, configured to adjust a radiation dose of a pulse of radiation in said first pulsed sub-beam of radiation based on the radiation dose of said pulse of radiation determined by said at least one sensor; a second modulator, configured to adjust the radiation dose of a pulse of radiation in said second pulsed sub-beam of radiation based on the radiation dose of said pulse of radiation determined by said at least one sensor; and one or more radiation sinks, configured to absorb excess radiation directed from at least one of the first or second modulator.
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Specification