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Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

  • US 7,729,529 B2
  • Filed: 12/07/2004
  • Issued: 06/01/2010
  • Est. Priority Date: 12/07/2004
  • Status: Active Grant
First Claim
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1. A computer-implemented method for sorting defects in a design pattern of a reticle, comprising:

  • searching for defects of interest in inspection data using priority information and defect attributes associated with individual defects in combination with one or more characteristics of a region proximate the individual defects and one or more characteristics of the individual defects, wherein the inspection data is generated by comparing images of the reticle to each other to detect the individual defects in the design pattern of the reticle, wherein the images that are compared to each other are generated for different values of a lithographic variable, wherein the images comprise at least one reference image and at least one modulated image, and wherein the priority information is derived from a relationship between the individual defects and their corresponding modulation levels of the lithographic variable; and

    assigning one or more identifiers to the defects of interest.

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