Waveguide type optical device and manufacturing method of the waveguide type optical device
First Claim
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1. A waveguide type optical device, comprising:
- a substrate having a surface immediately upon which a waveguide core is formed;
a supplemental plate connected on the substrate by using an adhesive; and
a groove forming part formed by cutting through the supplemental plate so as to reach the substrate and cut the waveguide core, the groove forming part being where a functional thin film is inserted;
wherein the supplemental plate and the waveguide core adhere to each other;
a convex part is formed in at least one of a position of the substrate excluding a forming position of the waveguide core;
a concave part is formed in a position, facing the convex part, of the supplemental plate;
a height of the convex part is greater than a depth of the concave part;
a width of the convex part is equal to or smaller that a width of the concave part;
a width direction of the convex part is the same as a width direction of the waveguide core; and
the adhesive is provided in concave part so that the substrate and the supplemental plate are adhered to and fixed to each other.
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Abstract
A waveguide type optical device includes a substrate where a waveguide is formed; a supplemental plate connected on the substrate by using an adhesive; and a groove forming part formed by cutting through the supplemental plate so as to reach the substrate and cut the waveguide, the groove forming part being where a functional thin film is inserted. The supplemental plate and the waveguide adhere to each other or come close to each other in a range not influencing a mode of light.
23 Citations
7 Claims
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1. A waveguide type optical device, comprising:
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a substrate having a surface immediately upon which a waveguide core is formed; a supplemental plate connected on the substrate by using an adhesive; and a groove forming part formed by cutting through the supplemental plate so as to reach the substrate and cut the waveguide core, the groove forming part being where a functional thin film is inserted; wherein the supplemental plate and the waveguide core adhere to each other; a convex part is formed in at least one of a position of the substrate excluding a forming position of the waveguide core; a concave part is formed in a position, facing the convex part, of the supplemental plate; a height of the convex part is greater than a depth of the concave part; a width of the convex part is equal to or smaller that a width of the concave part; a width direction of the convex part is the same as a width direction of the waveguide core; and the adhesive is provided in concave part so that the substrate and the supplemental plate are adhered to and fixed to each other. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A waveguide type optical device, comprising:
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a substrate having a surface immediately upon which a waveguide core is formed; a supplemental plate connected on the substrate by using an adhesive; and a groove forming part formed by cutting through the supplemental plate so as to reach the substrate and cut the waveguide core, the groove forming part being where a functional thin film is inserted, wherein; the supplemental plate and the waveguide core adhere to each other or come close to each other in a range not influencing a mode of light; a convex part is formed in at least one of a position of the substrate excluding a forming position of the waveguide core; a concave part is formed in a position, facing the convex part, of the supplemental plate; a height of the convex part is greater than a depth of the concave part; a width of the convex part is equal to or smaller than a width of the concave part; a width direction of the convex part is the same as a width direction of the waveguide core; and the adhesive is provided in the concave part so that the substrate and the supplemental plate are adhered to and fixed to each other.
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Specification