Method and apparatus for verifying a site-dependent wafer
First Claim
1. A method of verifying a Site-Dependent (S-D) wafer comprising:
- receiving a first S-D wafer using a Non-Site-Dependent (N-S-D) transfer system;
transferring the first S-D wafer to a first S-D processing element using the N-S-D transfer system;
creating one or more unverified S-D wafers, wherein one or more S-D unverified evaluation features are created at one or more sites on a first S-D unverified wafer using a first S-D creation procedure;
determining a first S-D evaluation wafer using the one or more unverified S-D wafers;
transferring the first S-D evaluation wafer to a first S-D evaluation element using the N-S-D transfer system, or a Site-Dependent (S-D) transfer system, or a combination thereof;
establishing first confidence data for the first S-D evaluation wafer using a first S-D evaluation procedure, wherein a S-D unverified evaluation feature at a first site on the first S-D evaluation wafer is evaluated;
comparing the first confidence data for the first S-D evaluation wafer to first confidence limits;
identifying the first unverified evaluation feature as a high confidence feature having a first level of confidence associated therewith and identifying the first S-D evaluation wafer as a high confidence wafer having the first level of confidence associated therewith, when a first confidence limit is met; and
applying a first corrective action when the first confidence limit is not met.
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Abstract
The present invention includes a method of verifying a Site-Dependent (S-D) wafer that includes receiving a first set of S-D wafers by one or more S-D processing elements in one or more processing subsystems, creating a first set of unverified S-D wafers by performing a first S-D creation procedure, establishing S-D wafer state data for each unverified S-D wafer, establishing a first set of evaluation wafers comprising a first number of the unverified S-D wafers, establishing first operational states for a plurality of S-D evaluation elements, determining a first number of available evaluation elements, establishing a first S-D transfer sequence, transferring the first set of S-D evaluation wafers to the first number of available evaluation elements in one or more evaluation subsystems and applying a first corrective action when the number of S-D evaluation wafers is greater than the first number of available evaluation elements.
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Citations
20 Claims
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1. A method of verifying a Site-Dependent (S-D) wafer comprising:
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receiving a first S-D wafer using a Non-Site-Dependent (N-S-D) transfer system; transferring the first S-D wafer to a first S-D processing element using the N-S-D transfer system; creating one or more unverified S-D wafers, wherein one or more S-D unverified evaluation features are created at one or more sites on a first S-D unverified wafer using a first S-D creation procedure; determining a first S-D evaluation wafer using the one or more unverified S-D wafers; transferring the first S-D evaluation wafer to a first S-D evaluation element using the N-S-D transfer system, or a Site-Dependent (S-D) transfer system, or a combination thereof; establishing first confidence data for the first S-D evaluation wafer using a first S-D evaluation procedure, wherein a S-D unverified evaluation feature at a first site on the first S-D evaluation wafer is evaluated; comparing the first confidence data for the first S-D evaluation wafer to first confidence limits; identifying the first unverified evaluation feature as a high confidence feature having a first level of confidence associated therewith and identifying the first S-D evaluation wafer as a high confidence wafer having the first level of confidence associated therewith, when a first confidence limit is met; and applying a first corrective action when the first confidence limit is not met. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification