Thin film multi-layered pyroelectric capacitor
First Claim
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1. A pyroelectric device comprised of:
- a plurality of layers of a polar dielectric material having a pyroelectric coefficient, p, wherein each layer exhibits pyroelectric properties;
a plurality of conductive electrodes, wherein each conductive electrode is substantially in contact with at least a portion of one surface of a respective at least one of said plurality of layers of polar dielectric material,wherein said electrodes are electrically connected in a series configuration as to form a series of capacitors comprised of said plurality of layers of polar dielectric material and plurality of conductive electrodes.
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Abstract
Aspects described herein provide for the design and fabrication of a device with an enhanced pyroelectric response signal comprised of multi-capacitors that are connected in series. These capacitors are fabricated using multi-layers of materials such as lead zirconate titanate (PZT), BaxSr1-xTiO3 (barium strontium titanate) and Bi4Ti3O12 (bismuth titanate) films that exhibit pyroelectric affect and belong to the class of polar materials. By controlling the poling direction of the multi-layer integrated structure, the pyroelectric voltage can be aligned in one direction, and as a result, the voltage output from the single element is the total contribution from each capacitor.
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19 Claims
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1. A pyroelectric device comprised of:
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a plurality of layers of a polar dielectric material having a pyroelectric coefficient, p, wherein each layer exhibits pyroelectric properties; a plurality of conductive electrodes, wherein each conductive electrode is substantially in contact with at least a portion of one surface of a respective at least one of said plurality of layers of polar dielectric material, wherein said electrodes are electrically connected in a series configuration as to form a series of capacitors comprised of said plurality of layers of polar dielectric material and plurality of conductive electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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