Direct acting capacitive transducer
First Claim
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1. A capacitive transducer comprising:
- a set of electrodes arranged with a dielectric material there between, the electrodes and the dielectric material thereby forming a capacitor,wherein the capacitor is arranged in such a manner that electrical energy supplied to the electrodes can be at least partly converted into mechanical work for actuation by the transducer, and in such a manner that the transducer in an unsupported state fulfils Euler'"'"'s criteria for stability within a normal operating range for the transducer, andwherein at least one surface of the dielectric material is provided with a corrugated pattern.
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Abstract
A capacitive transducer having a significantly increased actuation force and improved response time as compared to similar prior art capacitive transducers. In the capacitive transducer of the present invention it is not necessary to balance response time and actuation force or to provide pre-strain to the transducer in a direction of actuation. Additionally, buckling in the capacitive transducer is prevented, or at least substantially reduced, in a simple manner.
187 Citations
48 Claims
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1. A capacitive transducer comprising:
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a set of electrodes arranged with a dielectric material there between, the electrodes and the dielectric material thereby forming a capacitor, wherein the capacitor is arranged in such a manner that electrical energy supplied to the electrodes can be at least partly converted into mechanical work for actuation by the transducer, and in such a manner that the transducer in an unsupported state fulfils Euler'"'"'s criteria for stability within a normal operating range for the transducer, and wherein at least one surface of the dielectric material is provided with a corrugated pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification