Microfabricated bulk wave acoustic bandgap device
First Claim
1. A bulk wave acoustic bandgap device, comprising:
- a substrate;
a membrane comprising a matrix material, suspended above the substrate, that propagates a longitudinal acoustic wave in the plane of the membrane; and
a two-dimensional periodic array of scatterers embedded within the matrix material, wherein the periodic array comprises a cermet topology and wherein the scatterer material has a higher acoustic impedance than the matrix material and wherein the periodicity of the array causes destructive interference of the longitudinal acoustic wave within an acoustic bandgap.
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Abstract
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 μm or less).
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Citations
18 Claims
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1. A bulk wave acoustic bandgap device, comprising:
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a substrate; a membrane comprising a matrix material, suspended above the substrate, that propagates a longitudinal acoustic wave in the plane of the membrane; and a two-dimensional periodic array of scatterers embedded within the matrix material, wherein the periodic array comprises a cermet topology and wherein the scatterer material has a higher acoustic impedance than the matrix material and wherein the periodicity of the array causes destructive interference of the longitudinal acoustic wave within an acoustic bandgap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification