Micro-electromechanical sub-assembly having an on-chip transfer mechanism

• US 7,735,216 B2
• Filed: 01/15/2004
• Issued: 06/15/2010
• Est. Priority Date: 01/15/2004
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Smith, Peter A., Schnabel, Christopher M., Florkey, John E., Volant, Richard P.
• Primary Examiner(s): TRINH, MINH N
• Application Number:
  US10/597,012
• Publication Number:
  US 20090019691A1
• Time in Patent Office: 2,343 Days
• Field of Search: 297/39, 297/40, 297/29, 297/42, 297/41, 298/28, 29832-834, 414/224.01, 414/225.01, 414/226, 414/752.1, 414/744.3, 294/95, 294/116, 198/468.2, 257/700.MS, 257/754
• US Class Current: 29/740
• CPC Class Codes: B81C 3/002 Aligning microparts
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49133 with component orienting
• CPC Class Codes: Y10T 29/53178 Chip component
• CPC Class Codes: Y10T 29/53183 Multilead component
• CPC Class Codes: Y10T 29/53187 Multiple station assembly apparatus

Abstract

Carriers (10) holding parts (50) for assembling complex MEMS devices are transported to a central assembly location. The parts are stacked in a pre-assigned order and later released from their carriers. Alternatively, they are positioned over the appropriate location and released so as to fall into position as needed. The assembly area (100) includes a cavity below the plane of the carriers such that the parts held within the carrier drop into the cavity. Heating elements are integrated into the cavity to assist in the release of the parts. The cavity is supplied with parts by one or more carriers which are move around by any number of MEMS drive systems (200, 250). The cavity and some of the MEMS assembled therein deliver with precision amounts of materials as required suitable for biomedical applications, or may be processed in-situ, as in an on-chip laboratory.

Claims

1. An on-chip system on a substrate comprising:

at least one carrier holding a plurality of parts integral to said at least one carrier;

an assembly area having a cavity provided with alignment posts; and

a transport for moving said at least one carrier to said assembly area, and for moving a subset of said parts to said cavity onto said alignment posts, said plurality of parts being attached to said carrier by filling a gap between said carrier and said plurality of parts with material that is selectively etched with respect to the material that said carrier and said plurality of parts are made of.

2. The on-chip system as recited in claim 1, wherein said transport is provided with a plurality of comb drives engaging gears.

3. The on-chip system as recited in claim 1, wherein said plurality of parts within said cavity are in a pre-assigned order.

4. The on-chip system as recited in claim 1, wherein said alignments form sidewalls of said cavity.

5. The on-chip system as recited in claim 1, wherein said plurality of parts are detached from said carrier after being placed in said cavity.

6. The on-chip system as recited in claim 1, wherein said plurality of parts are attached to said carrier by mechanical tabs.

7. The on-chip system as recited in claim 6, wherein said mechanical tabs are removed by isotropic etch.

8. The on-chip system as recited in claim 6, wherein said mechanical tabs are removed by electrical current that causes mechanical destruction of said tabs.

9. The on-chip system as recited in claim 6, wherein said mechanical tabs are removed by laser ablation.

10. The on-chip system as recited in claim 1, wherein said carrier is removed from said assembly area after said parts have been detached.

11. The on-chip system as recited in claim 1, wherein the carrier remains in-situ after detaching said plurality of parts.

12. The on-chip system as recited in claim 1, wherein said plurality of parts and said assembly area are fabricated concurrently and assembled.

13. The on-chip system as recited in claim 1, wherein said transport is controlled by a driver.

14. The on-chip system as recited in claim 13, wherein said driver comprises comb drives coupled to gears.

15. The on-chip system as recited in claim 14, wherein said gears engage matching teeth of said carrier.

16. The on-chip system as recited in claim 15, wherein said gears are provided with a shoulder to stabilize said carrier.

17. The on-chip system as recited in claim 16, wherein said shoulders ride over said matching teeth positioned on the sides of said carrier.