Reactor design to reduce particle deposition during process abatement

• US 7,736,599 B2
• Filed: 11/12/2004
• Issued: 06/15/2010
• Est. Priority Date: 11/12/2004
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Clark, Daniel O., Crawford, Shaun W., Todd, Leonard B., Jung, Jay J., Chiu, Ho-Man Rodney, Vermeulen, Robbert
• Primary Examiner(s): DUONG, THANH P
• Application Number:
  US10/987,921
• Publication Number:
  US 20060104879A1
• Time in Patent Office: 2,041 Days
• Field of Search: 422/168, 422/169, 422/171, 422/172, 422/173, 552/40, 552/48
• US Class Current: 422/168
• CPC Class Codes: F23D 2900/00016 Preventing or reducing deposit build-up on burner parts, e.g. from carbon
• CPC Class Codes: F23G 7/065 using gaseous or liquid fuel
• CPC Class Codes: F23J 9/00 Preventing premature solidification of molten combustion residues
• CPC Class Codes: F23M 2900/05002 Means for accommodate thermal expansion of the wall liner
• CPC Class Codes: F23M 2900/05004 Special materials for walls or lining
• CPC Class Codes: F23M 5/085 using air or other gas as the cooling medium

Abstract

The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.

Claims

1. A thermal abatement reactor for removing pollutant from waste gas, the thermal reactor comprising:

a thermal reaction unit comprising;

an exterior wall having a plurality of perforations for passage of a fluid therethrough;

a porous ceramic interior wall defining a thermal reaction chamber, wherein the interior wall comprises at least two ring sections in a stacked arrangement;

at least one waste gas inlet in fluid communication with the thermal reaction chamber for introducing a waste gas therein; and

at least one fuel inlet in fluid communication with the thermal reaction chamber for introducing a fuel for use during decomposition of said waste gas in the thermal reaction chamber; and

means for directing a fluid through the one or more perforations of the exterior wall and the porous ceramic interior wall to reduce the deposition and accumulation of particulate matter thereon; and

a water quench unit coupled to the thermal reaction unit and adapted to receive a gas stream from the thermal reaction unit;

wherein the total number of perforations in proximity to the waste gas inlet and the fuel inlet is greater than the total number of perforations in proximity to the water quench unit.

2. The thermal abatement reactor of claim 1, coupled in waste gas receiving relationship to a process facility selected from the group consisting of a semiconductor manufacturing process facility and a liquid crystal display (LCD) process facility.

3. The thermal abatement reactor of claim 1, wherein the metal exterior wall has perforations that provide a pressure drop across the thermal reaction unit of greater than about 0.1 psi.

4. The thermal abatement reactor of claim 1, wherein the thermal reaction unit is adapted so that more fluid flows through the porous ceramic interior wall in proximity to the waste gas inlet and the fuel inlet than in proximity to the water quench unit.

5. The thermal abatement reactor of claim 1, wherein the at least two ring sections are complimentarily jointed for connection of adjacent stacked rings.

6. The thermal abatement reactor of claim 1, wherein the thermal reaction unit further comprises a porous ceramic plate positioned at or within the interior wall of the thermal reaction chamber, and wherein the porous ceramic plate encloses one end of said thermal reaction chamber.

7. The thermal abatement reactor of claim 6, further comprising means for directing fluid through the porous ceramic plate to reduce deposition and accumulation of particulate matter thereon.

8. The thermal abatement reactor of claim 6, further comprising a center jet in fluid communication with the thermal reaction chamber, wherein the center jet is in proximity to the at least one waste gas inlet and the at least one fuel inlet, and wherein the center jet is adapted to introduce high velocity fluid into the thermal reaction chamber through the center jet during decomposition of the waste gas to inhibit deposition and accumulation of particulate matter on the interior wall and porous ceramic plate of the thermal reaction chamber proximate to the center jet.

9. The thermal abatement reactor of claim 1, further comprising a water resistant shield between the thermal reaction unit and the water quench unit.

10. The thermal abatement reactor of claim 1, further comprising an outer reactor shell having an outer reactor shell interior wall, wherein an annular space is formed between the outer reactor shell interior wall and the exterior wall of the thermal reaction unit.

11. The thermal abatement reactor of claim 1, wherein the at least one waste gas inlet has an interior wall, and wherein the interior wall is coated with at least one layer of a coating material comprising a fluoropolymer.

12. The thermal abatement reactor of claim 1, wherein the porous ceramic interior wall comprises a reticulated ceramic interior wall.

13. A thermal abatement reactor for removing pollutant from waste gas, the thermal reactor comprising:

a thermal reaction unit comprising;

an exterior wall having a plurality of perforations for passage of a fluid therethrough;

a porous ceramic interior wall defining a thermal reaction chamber, wherein the interior wall comprises at least two ring sections in a stacked arrangement;

at least one waste gas inlet in fluid communication with the thermal reaction chamber for introducing a waste gas therein; and

at least one fuel inlet in fluid communication with the thermal reaction chamber for introducing a fuel for use during decomposition of said waste gas in the thermal reaction chamber; and

means for directing a fluid through the one or more perforations of the exterior wall and the porous ceramic interior wall to reduce the deposition and accumulation of particulate matter thereon;

a water quench unit coupled to the thermal reaction unit and adapted to receive a gas stream from the thermal reaction unit; and

a fibrous material disposed between the exterior wall and the porous ceramic interior wall.

15. The thermal abatement reactor of claim 13, coupled in waste gas receiving relationship to a process facility selected from the group consisting of a semiconductor manufacturing process facility and a liquid crystal display (LCD) process facility.

16. The thermal abatement reactor of claim 13, wherein the metal exterior wall has perforations that provide a pressure drop across the thermal reaction unit of greater than about 0.1 psi.

17. The thermal reactor of claim 13, wherein the thermal reaction unit is adapted so that more fluid flows through the porous ceramic interior wall in proximity to the waste gas inlet and the fuel inlet than in proximity to the water quench unit.

18. The thermal abatement reactor of claim 13, wherein the at least two ring sections are complimentarily jointed for connection of adjacent stacked rings.

19. The thermal abatement reactor of claim 13, wherein the thermal reaction unit further comprises a porous ceramic plate positioned at or within the interior wall of the thermal reaction chamber, and wherein the porous ceramic plate encloses one end of said thermal reaction chamber.

20. The thermal abatement reactor of claim 19, further comprising means for directing fluid through the porous ceramic plate to reduce deposition and accumulation of particulate matter thereon.

21. The thermal reactor of claim 19, further comprising a center jet in fluid communication with the thermal reaction chamber, wherein the center jet is in proximity to the at least one waste gas inlet and the at least one fuel inlet, and wherein the center jet is adapted to introduce high velocity fluid into the thermal reaction chamber through the center jet during decomposition of the waste gas to inhibit deposition and accumulation of particulate matter on the interior wall and porous ceramic plate of the thermal reaction chamber proximate to the center jet.

22. The thermal abatement reactor of claim 13, further comprising a water resistant shield between the thermal reaction unit and the water quench unit.

23. The thermal abatement reactor of claim 13, further comprising an outer reactor shell having an outer reactor shell interior wall, wherein an annular space is formed between the outer reactor shell interior wall and the exterior wall of the thermal reaction unit.

24. The thermal abatement reactor of claim 13, wherein the at least one waste gas inlet has an interior wall, and wherein the interior wall is coated with at least one layer of a coating material comprising a fluoropolymer.

25. The thermal abatement reactor of claim 13, wherein the porous ceramic interior wall comprises a reticulated ceramic interior wall.

14. The thermal abatement reactor of 13, wherein the fibrous material comprises material selected from the group consisting of spinel fibers, glass wool and aluminum silicate.