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Method for manufacturing photoelectric conversion device

  • US 7,736,933 B2
  • Filed: 07/18/2008
  • Issued: 06/15/2010
  • Est. Priority Date: 07/27/2007
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a photoelectric conversion device comprising:

  • supplying a reactive gas containing helium to a treatment chamber having a plurality of waveguides which are juxtaposed so as to be projected in a comb-shape; and

    forming a photoelectric conversion layer of a microcrystalline semiconductor over a substrate placed in the treatment chamber by supplying a microwave to space sandwiched between the plurality of waveguides to generate plasma, while maintaining a pressure in the treatment chamber at equal to or greater than 1×

    102 Pa and equal to or less than 1×

    105 Pa.

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