×

Contamination barrier with expandable lamellas

  • US 7,737,425 B2
  • Filed: 05/16/2007
  • Issued: 06/15/2010
  • Est. Priority Date: 12/23/2002
  • Status: Expired due to Fees
First Claim
Patent Images

1. A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source, the contamination barrier comprising:

  • a support structure comprising an inner ring;

    a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure; and

    a shield configured to shield the inner ring of the support structure from being hit by radiation or debris from the radiation source.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×