Methods and systems for inspection of a specimen using different inspection parameters
First Claim
1. A computer-implemented method, comprising:
- determining optimal parameters for inspection of a specimen based on defects selected for detection on the specimen, wherein the optimal parameters result in a number of false defects detected during the inspection equal to or less than that which would be detected during the inspection using other parameters, wherein the optimal parameters result in fewer non-selected defects being detected during the inspection than that which would be detected during the inspection using the other parameters, wherein the selected defects have a defect type different than the defect type of the non-selected defects, and wherein the non-selected defects comprise defects other than false defects; and
setting parameters of an inspection system at the optimal parameters prior to the inspection of the specimen, wherein the inspection comprises scanning the specimen with the inspection system.
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Abstract
Methods and systems for inspection of a specimen using different parameters are provided. One computer-implemented method includes determining optimal parameters for inspection based on selected defects. This method also includes setting parameters of an inspection system at the optimal parameters prior to inspection. Another method for inspecting a specimen includes illuminating the specimen with light having a wavelength below about 350 nm and with light having a wavelength above about 350 nm. The method also includes processing signals representative of light collected from the specimen to detect defects or process variations on the specimen. One system configured to inspect a specimen includes a first optical subsystem coupled to a broadband light source and a second optical subsystem coupled to a laser. The system also includes a third optical subsystem configured to couple light from the first and second optical subsystems to an objective, which focuses the light onto the specimen.
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Citations
16 Claims
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1. A computer-implemented method, comprising:
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determining optimal parameters for inspection of a specimen based on defects selected for detection on the specimen, wherein the optimal parameters result in a number of false defects detected during the inspection equal to or less than that which would be detected during the inspection using other parameters, wherein the optimal parameters result in fewer non-selected defects being detected during the inspection than that which would be detected during the inspection using the other parameters, wherein the selected defects have a defect type different than the defect type of the non-selected defects, and wherein the non-selected defects comprise defects other than false defects; and setting parameters of an inspection system at the optimal parameters prior to the inspection of the specimen, wherein the inspection comprises scanning the specimen with the inspection system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification