Processing system with increased cassette storage capacity
First Claim
1. A semiconductor substrate processing system, comprising:
- a housing for separating the system from a surrounding clean room;
a reactor within the housing; and
a front-end for loading substrate cassettes into the housing, the front-end being disposed adjacent to and in front of the housing and comprising;
a partition disposed between an interior of the housing and the surrounding clean room;
at least one lower input/output port, each at least one lower input/output port having a lower openable closure in the partition, the lower openable closure allowing cassettes access from the clean room into the housing;
at least one upper input/output port disposed above the at least one lower input/output port, each at least one upper input/output port having an upper openable closure in the partition, the upper openable closure allowing cassettes access from the clean room into the housing; and
at least one cassette storage position disposed at a vertical level between the at least one lower input/output port and the at least one upper input/output port, the at least one storage position configured to receive cassettes transported into the housing,wherein one of the at least one lower input/output port, one of the at least one upper input/output port, and one of the at least one cassette storage position are arranged in a column along a same side of the partition.
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Accused Products
Abstract
A system for processing semiconductor substrates includes a front-end with at least two vertical levels of input/output ports for transferring substrate cassettes into or out of the housing of the processing system. The front-end also includes at least one level of storage positions, e.g., two levels of storage positions, which can be disposed between the two vertical levels of the input/output ports. The two vertical levels of storage positions can each be provided with two storage positions and each of two levels of input/output ports can be provided with accommodations for two cassettes, allowing for a total of eight cassettes to be accommodated at the front-end of the processing system. Inside the housing of the processing system, interior storage positions can be provided adjacent a wafer handling chamber and spaced apart from a cassette store having rotary platforms for housing cassettes. A single cassette handler can be used to access cassettes at each of the input/output ports and the interior storage positions.
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Citations
26 Claims
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1. A semiconductor substrate processing system, comprising:
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a housing for separating the system from a surrounding clean room; a reactor within the housing; and a front-end for loading substrate cassettes into the housing, the front-end being disposed adjacent to and in front of the housing and comprising; a partition disposed between an interior of the housing and the surrounding clean room; at least one lower input/output port, each at least one lower input/output port having a lower openable closure in the partition, the lower openable closure allowing cassettes access from the clean room into the housing; at least one upper input/output port disposed above the at least one lower input/output port, each at least one upper input/output port having an upper openable closure in the partition, the upper openable closure allowing cassettes access from the clean room into the housing; and at least one cassette storage position disposed at a vertical level between the at least one lower input/output port and the at least one upper input/output port, the at least one storage position configured to receive cassettes transported into the housing, wherein one of the at least one lower input/output port, one of the at least one upper input/output port, and one of the at least one cassette storage position are arranged in a column along a same side of the partition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A loading station for a batch semiconductor fabrication system, comprising:
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a partition disposed between an interior of the housing and the surrounding clean room; a lower input/output port for holding a substrate cassette and having a lower openable closure in the partition, the lower openable closure allowing cassette access into the housing of the semiconductor fabrication system; an upper input/output port for holding a substrate cassette, the upper input/output port disposed above the lower input/output port and having an upper openable closure in the partition, the upper openable closure allowing cassette access into the housing; and at least one storage position for holding a substrate cassette, the at least one storage position disposed vertically between the lower input/output port and the upper input/output port, wherein one of the lower input/output port, one of the upper input/output port, and one of the at least one cassette storage position are arranged in a column along a same side of the partition. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification