Inductively coupled antenna and plasma processing apparatus using the same
First Claim
1. An inductively coupled antenna, comprising:
- a single coil having a plurality of turns including an outermost turn and a plurality of inner turns, wherein the outermost turn is connected in parallel with the plurality of inner turns and a sum of lengths of the plurality of inner turns is longer than a length of the outermost turn.
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Accused Products
Abstract
An inductively coupled antenna for installation on a reaction chamber of an inductively coupled plasma (ICP) processing apparatus and for connection to a radio frequency (RF) power source to induce an electric field for ionizing a reactant gas injected into the reaction chamber and for generating plasma includes a coil having a plurality of turns including an outermost turn and a plurality of inner turns, wherein a current flowing through the outermost turn is larger than a current flowing through the plurality of inner turns. The outermost turn and the inner turns are connected to the RF power supply in parallel and the inner turns are connected to each other in series. The inductively coupled antenna further includes a conductive metal tube that has a cooling path and a conductive metal strip that is electrically and thermally connected to a lower portion of the metal tube.
22 Citations
20 Claims
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1. An inductively coupled antenna, comprising:
a single coil having a plurality of turns including an outermost turn and a plurality of inner turns, wherein the outermost turn is connected in parallel with the plurality of inner turns and a sum of lengths of the plurality of inner turns is longer than a length of the outermost turn. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An inductively coupled plasma (ICP) processing apparatus, comprising:
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a reaction chamber maintained in a vacuum state; an antenna installed on the reaction chamber to induce an electric field for ionizing a reactant gas injected into the reaction chamber and for generating plasma; and a RF power source that is connected to the antenna to supply RF power, wherein the antenna is formed of a single coil having a plurality of turns, including an outermost turn and a plurality of inner turns, wherein the outermost turn is connected in parallel with the plurality of inner turns and wherein a sum of lengths of the plurality of inner turns is longer than a length of the outermost turn. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification