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Inductively coupled antenna and plasma processing apparatus using the same

  • US 7,740,738 B2
  • Filed: 12/31/2003
  • Issued: 06/22/2010
  • Est. Priority Date: 01/03/2003
  • Status: Active Grant
First Claim
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1. An inductively coupled antenna, comprising:

  • a single coil having a plurality of turns including an outermost turn and a plurality of inner turns, wherein the outermost turn is connected in parallel with the plurality of inner turns and a sum of lengths of the plurality of inner turns is longer than a length of the outermost turn.

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