Method for integrating trench MOS Schottky barrier devices into integrated circuits and related semiconductor devices
First Claim
1. A method comprising:
- forming a plurality of trenches in a semiconductor substrate, the plurality of trenches including an outer trench and a plurality of inner trenches within the outer trench;
forming a metal-oxide semiconductor (MOS) device and a trench MOS Schottky barrier (TMBS) device in the semiconductor substrate using the plurality of trenches; and
forming a guard ring that covers portions of the inner trenches, the guard ring open over other portions of the inner trenches.
1 Assignment
0 Petitions
Accused Products
Abstract
Trenches are formed in a semiconductor substrate, where the trenches include an outer trench and multiple inner trenches within the outer trench. A metal-oxide semiconductor (MOS) device and a trench MOS Schottky barrier (TMBS) device are also formed in the semiconductor substrate using the trenches. The MOS device could include the outer trench, and the TMBS device could include the inner trenches. At least one of the inner trenches may contact the outer trench, and/or at least one of the inner trenches may be electrically isolated from the outer trench. The MOS device could represent a trench vertical double-diffused metal-oxide semiconductor (VDMOS) device, and the TMBS device may be monolithically integrated with the trench VDMOS device in the semiconductor substrate. A guard ring that covers portions of the inner trenches and that is open over other portions of the inner trenches could optionally be formed in the semiconductor substrate.
17 Citations
20 Claims
-
1. A method comprising:
-
forming a plurality of trenches in a semiconductor substrate, the plurality of trenches including an outer trench and a plurality of inner trenches within the outer trench; forming a metal-oxide semiconductor (MOS) device and a trench MOS Schottky barrier (TMBS) device in the semiconductor substrate using the plurality of trenches; and forming a guard ring that covers portions of the inner trenches, the guard ring open over other portions of the inner trenches. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. An integrated circuit comprising:
-
a semiconductor substrate; a metal-oxide semiconductor (MOS) device monolithically integrated with a trench MOS Schottky barrier (TMBS) device, the MOS device and the TMBS device comprising a plurality of trenches in the semiconductor substrate, the plurality of trenches including an outer trench and a plurality of inner trenches within the outer trench; and a guard ring covering portions of the inner trenches, the guard ring open over other portions of the inner trenches. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
-
17. An integrated circuit comprising:
-
a semiconductor substrate; a vertical double-diffused metal-oxide semiconductor (VDMOS) device formed in a portion of the substrate, the VDMOS device comprising an outer trench ring in the substrate; and a trench MOS Schottky barrier (TMBS) device formed in another portion of the substrate, the TMBS device comprising a plurality of inner trenches surrounded by the outer trench ring in the substrate, the inner trenches electrically isolated from the outer trench ring. - View Dependent Claims (18, 19, 20)
-
Specification