Methods and apparatus for spatial light modulation
First Claim
Patent Images
1. A projection display comprising:
- a transparent substrate;
a plurality of shutter-based MEMS light modulators disposed on a surface of the transparent substrate, wherein the shutter-based light modulators each include an actuator for driving a shutter, wherein the actuators include first and second compliant beams, which, in response to application of a voltage across the first and second compliant beams, deform towards one another; and
projection optics for projecting light modulated by the shutter-based MEMS light modulators onto a display surface to form an image.
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Abstract
The invention relates to methods and apparatus for forming images on a display utilizing a control matrix to control the movement of MEMs-based light modulators.
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Citations
7 Claims
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1. A projection display comprising:
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a transparent substrate; a plurality of shutter-based MEMS light modulators disposed on a surface of the transparent substrate, wherein the shutter-based light modulators each include an actuator for driving a shutter, wherein the actuators include first and second compliant beams, which, in response to application of a voltage across the first and second compliant beams, deform towards one another; and projection optics for projecting light modulated by the shutter-based MEMS light modulators onto a display surface to form an image. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A projection display comprising:
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a transparent substrate; a plurality of shutter-based MEMS light modulators disposed on a surface of the transparent substrate, wherein one of the shutter-based light modulators includes a shutter configured for motion limited substantially to a plane that is parallel to the surface of transparent substrate, wherein the shutter includes mechanical supports coupled to the shutter for limiting motion of the shutter in a direction normal to the plane of the surface of the transparent substrate and at least one of the mechanical supports is anchored to the transparent substrate in at least two locations to reduce rotational movement of the shutter; and projection optics for projecting light modulated by the shutter-based MEMS light modulators onto a display surface to form an image.
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Specification