Mirror device comprising micromirrors possessing a specific natural oscillation frequency
First Claim
1. A mirror device comprising a plurality of mirror elements, wherein each of said mirror elements including a deflecting mirror supported by an elastic hinge for operating in at least three mirror-deflecting states wherein:
- said mirror supported by said elastic hinge constituting an oscillation system having a natural oscillation cycle T where T satisfies a condition of;
110 [μ
sec]>
T=2π
*√
(I/K)>
2 [μ
sec],where “
I”
is the moment of rotation of said oscillation system and “
K”
is the spring constant of the elastic hinge.
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Accused Products
Abstract
The present invention aims at providing a mirror device, comprising a plurality of mirror elements, wherein each of the mirror elements comprises a deflectable mirror, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies:
110 [μsec]>T=2π*√(I/K)>2 [μsec],
where “I” is the moment of rotation of the oscillation system and “K” is the spring constant of the elastic member.
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Citations
16 Claims
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1. A mirror device comprising a plurality of mirror elements, wherein each of said mirror elements including a deflecting mirror supported by an elastic hinge for operating in at least three mirror-deflecting states wherein:
-
said mirror supported by said elastic hinge constituting an oscillation system having a natural oscillation cycle T where T satisfies a condition of;
110 [μ
sec]>
T=2π
*√
(I/K)>
2 [μ
sec],where “
I”
is the moment of rotation of said oscillation system and “
K”
is the spring constant of the elastic hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A projection apparatus, comprising:
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a light source; a light source control circuit for controlling the light source; an illumination optical system for condensing the light emitted from the light source into a mirror device; and a control circuit for controlling the mirror device on the basis of an input signal, wherein the mirror device comprises a plurality of deflectable mirrors, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies;
110 [μ
sec]>
T=2π
*√
(I/K)>
2 [μ
sec],where “
I”
is the moment of rotation of the oscillation system and “
K”
is the spring constant of the elastic member. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification