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Mirror device comprising micromirrors possessing a specific natural oscillation frequency

  • US 7,742,218 B2
  • Filed: 09/04/2008
  • Issued: 06/22/2010
  • Est. Priority Date: 05/23/2005
  • Status: Expired due to Fees
First Claim
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1. A mirror device comprising a plurality of mirror elements, wherein each of said mirror elements including a deflecting mirror supported by an elastic hinge for operating in at least three mirror-deflecting states wherein:

  • said mirror supported by said elastic hinge constituting an oscillation system having a natural oscillation cycle T where T satisfies a condition of;


    110 [μ

    sec]>

    T=

    *√

    (I/K)>

    2 [μ

    sec],where “

    I”

    is the moment of rotation of said oscillation system and “

    K”

    is the spring constant of the elastic hinge.

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