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Fiber optic MEMS seismic sensor with mass supported by hinged beams

  • US 7,743,661 B2
  • Filed: 02/12/2007
  • Issued: 06/29/2010
  • Est. Priority Date: 04/26/2006
  • Status: Active Grant
First Claim
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1. A fiber optic MEMS seismic sensor comprising:

  • a frame;

    a proof mass supported by the frame, the proof mass having a hole formed therein, the hole movable with respect to the frame; and

    a sensor gap defined between a first reflector and a second reflector, the first reflector located adjacent the proof mass at a first end of the hole, the second reflector located at an opposite end of the hole, wherein the second reflector is bonded to the proof mass.

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