Method for manufacturing semiconductor sensor
First Claim
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1. A method of manufacturing a semiconductor sensor, comprising the steps of:
- removing a predetermined portion of a semiconductor substrate selectively except for at least a region where a supporting part is to be formed so as to form a weight arranging part and a flexible part; and
forming a weight on a surface of the semiconductor substrate at the weight arranging part, and said weight comprises a resin part provided on the weight arranging part, said resin part being made of resin, and a central part provided on the resin part, said metal part including at least a metal.
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Abstract
A semiconductor sensor is disclosed that includes a substrate including at least a semiconductor layer. The substrate includes a weight arranging part in the vicinity of the center of the substrate, a flexible part around the weight arranging part, and supporting parts provided around the flexible part. The semiconductor sensor further includes a weight arranged on the weight arranging part. The weight is made of a material different from that of the weight arranging part and the flexible parts.
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Citations
13 Claims
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1. A method of manufacturing a semiconductor sensor, comprising the steps of:
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removing a predetermined portion of a semiconductor substrate selectively except for at least a region where a supporting part is to be formed so as to form a weight arranging part and a flexible part; and forming a weight on a surface of the semiconductor substrate at the weight arranging part, and said weight comprises a resin part provided on the weight arranging part, said resin part being made of resin, and a central part provided on the resin part, said metal part including at least a metal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification