Nanotube films and articles

• US 7,745,810 B2
• Filed: 02/09/2004
• Issued: 06/29/2010
• Est. Priority Date: 07/25/2001
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Segal, Brent M., Rueckes, Thomas
• Primary Examiner(s): SMITH, MATTHEW S
• Application Number:
  US10/774,682
• Publication Number:
  US 20040159833A1
• Time in Patent Office: 2,332 Days
• Field of Search: 257/661, 257/662, 257/664, 257/739, 257/4, 257/414, 977/742
• US Class Current: 257/4
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: D01F 9/127 by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
• CPC Class Codes: D04H 1/4234 Metal fibres
• CPC Class Codes: D04H 1/4242 Carbon fibres
• CPC Class Codes: D04H 1/43838 Ultrafine fibres, e.g. microfibres
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/77 Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: H01L 23/53276 containing carbon, e.g. fullerenes superconducting fullerenes H10N60/853
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H10B 63/80 : Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
• CPC Class Codes: H10K 30/671 : Organic radiation-sensitive molecular electronic devices
• CPC Class Codes: H10K 71/12 : using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/231 : by etching of existing layers
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10S 977/742 : Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/75 : Single-walled
• CPC Class Codes: Y10S 977/778 : within specified host or matrix material, e.g. nanocomposite films
• CPC Class Codes: Y10S 977/943 : Information storage or retrieval using nanostructure
• CPC Class Codes: Y10T 428/24802 : Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
• CPC Class Codes: Y10T 428/2918 : including free carbon or carbide or therewith [not as steel]
• CPC Class Codes: Y10T 428/2982 : Particulate matter [e.g., sphere, flake, etc.]
• CPC Class Codes: Y10T 428/30 : Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

Nanotube films and articles and methods of making the same are disclosed. A conductive article includes an aggregate of nanotube segments in which the nanotube segments contact other nanotube segments to define a plurality of conductive pathways along the article. The nanotube segments may be single walled carbon nanotubes, or multi-walled carbon nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. The articles so formed may be disposed on substrates, and may form an electrical network of nanotubes within the article itself. Conductive articles may be made on a substrate by forming a nanotube fabric on the substrate, and defining a pattern within the fabric in which the pattern corresponds to the conductive article. The nanotube fabric may be formed by growing the nanotube fabric on the substrate using a catalyst, for example, in which the catalyst is a gas phase catalyst, or in which the catalyst is a metallic gas phase catalyst. The nanotube fabric may be formed by depositing a solution of suspended nanotubes on the substrate. The deposited solution may be spun to create a spin-coating of the solution. The solution may be deposited by dipping the substrate into the solution. The nanotube fabric is formed by spraying an aerosol having nanotubes onto a surface of the substrate.

Claims

1. An assembly including a substrate and a conductive trace disposed on the substrate, the trace having at least two sides that are substantially parallel to each other, wherein the trace includes a plurality of unaligned nanotubes for providing a plurality of conductive pathways along the trace.

2. The assembly of claim 1 wherein the nanotubes include single walled carbon nanotubes.

3. The assembly of claim 1 wherein the nanotubes include multi-walled nanotubes.

4. The assembly of claim 1 wherein the nanotubes have different lengths.

5. The assembly of claim 1 wherein the nanotubes include nanotubes having a length shorter than the length of the article.

6. An assembly including a substrate and a conductive trace disposed on the substrate, the trace having a width and a length, the length being substantially larger than the width, wherein the trace includes an electrical network of a plurality of unaligned nanotubes in contact with other nanotubes to provide a plurality of conductive pathways along the trace.

7. The assembly of claim 6 wherein the nanotubes include single walled carbon nanotubes.

8. The assembly of claim 6 wherein the nanotubes include multi-walled carbon nanotubes.

9. The assembly of claim 6 wherein the nanotubes have different lengths.

10. The assembly of claim 6 wherein the nanotubes include nanotubes having a length shorter than the length of the ribbon.

11. An assembly including a substrate and a conductive trace of predefined shape, the conductive trace being over the substrate, the conductive trace including a plurality of unaligned nanotubes for providing a plurality of conductive paths along the extent of the trace.

12. An assembly including a substrate, at least one metal electrode, and a conductive trace of predefined shape, the conductive trace being over the substrate, the conductive trace including a plurality of unaligned nanotubes for providing a plurality of conductive paths along the extent of the trace, and the metal electrode being over at least a portion of the conductive trace, the metal electrode being formed by a metallization step.

13. A wafer substrate structure having a non-woven fabric of unaligned nanotubes substantially parallel to and covering a major surface of the wafer substrate, the major surface of the substrate comprising a plurality of patterned conductors, and wherein the nanotubes of the fabric are arranged in accordance with inherent self-assembly traits of the nanotubes.

14. A wafer substrate structure having a non-woven fabric of unaligned nanotubes covering a major surface of the wafer substrate, the major surface of the substrate comprising a plurality of patterned conductors, and wherein the fabric comprises substantially a monolayer of nanotubes.

15. A wafer substrate structure having a non-woven fabric of unaligned nanotubes substantially parallel to and covering a major surface of the wafer substrate and wherein the fabric comprises a multilayer fabric having a controlled density of nanotubes.

16. A plurality of conductive traces on a substrate, each conductive trace extending substantially parallel to the substrate and comprising a non-woven fabric of carbon nanotubes, the plurality of conductive traces extending substantially parallel to each other and having a spaced relation between adjacent conductive traces.

17. The plurality of conductive traces of claim 16, wherein the substrate comprises a plurality of patterned conductors under the plurality of conductive traces.

18. The plurality of conductive traces of claim 17, further comprising a plurality of patterned conductors over the plurality of conductive traces.