Method of scanning
First Claim
Patent Images
1. A method of measurement by scanning comprising:
- providing a scanning measurement system having a sample holder and a relatively movable scanning device, the sample holder having a rotatable or longitudinal axis;
using the scanning device to perform a scan of at least a part of an object located on the sample holder and of at least a portion of a surface of the sample holder to obtain measurement data;
using at least a portion of the measurement data from the scan to establish an orientation of a plane of the sample holder and thereby establishing any misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis; and
interpreting at least a portion of the measurement data from the scan using the orientation of the plane of the sample holder in order to correct the measurement data for any established misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of scanning is disclosed comprising, providing a scanning system (10) having a sample holder (14) and a relatively movable scanning device (18), performing a scan of at least a part of an object (22) located on the sample holder (14), establishing orientation of the sample holder and interpreting data from a scan using the orientation whereby, the orientation is established using data from the scan of the surface of the sample holder. The orientation may be established by defining a plane (56b) of the sample holder, which may be limited by boundaries (76a, 76b).
7 Citations
12 Claims
-
1. A method of measurement by scanning comprising:
-
providing a scanning measurement system having a sample holder and a relatively movable scanning device, the sample holder having a rotatable or longitudinal axis; using the scanning device to perform a scan of at least a part of an object located on the sample holder and of at least a portion of a surface of the sample holder to obtain measurement data; using at least a portion of the measurement data from the scan to establish an orientation of a plane of the sample holder and thereby establishing any misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis; and interpreting at least a portion of the measurement data from the scan using the orientation of the plane of the sample holder in order to correct the measurement data for any established misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of measurement by scanning comprising:
-
providing a scanning measurement system having a sample holder and a relatively movable scanning device, the sample holder having a rotatable or longitudinal axis; performing a datum scan with the scanning device to obtain measurement data for establishing any misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis; performing a sample scan with the scanning device of a sample to obtain measurement data of the sample; and interpreting the measurement data of the sample from the sample scan using any misalignment or non-colinearity data obtained from the datum scan in order to correct the measurement data of the sample for any established misalignment or non-colinearity of the sample holder; wherein the scanning measurement system automatically carries out the datum scan and the sample scan. - View Dependent Claims (11)
-
-
12. A method of measurement by scanning comprising:
-
providing a scanning measurement system having a sample holder and a relatively movable scanning device, the sample holder having a rotatable or longitudinal axis; performing a datum scan with the scanning device to obtain measurement data for establishing any misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis; performing a sample scan with the scanning device of a sample to obtain measurement data of the sample; and interpreting data from the sample scan using any established misalignment or non-colinearity data from the datum scan in order to correct the measurement data of the sample for any established misalignment or non-colinearity of the sample holder; wherein both the datum scan and sample scan are carried out effectively as one scan.
-
Specification