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Method of scanning

  • US 7,747,408 B2
  • Filed: 11/04/2004
  • Issued: 06/29/2010
  • Est. Priority Date: 11/05/2003
  • Status: Expired due to Fees
First Claim
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1. A method of measurement by scanning comprising:

  • providing a scanning measurement system having a sample holder and a relatively movable scanning device, the sample holder having a rotatable or longitudinal axis;

    using the scanning device to perform a scan of at least a part of an object located on the sample holder and of at least a portion of a surface of the sample holder to obtain measurement data;

    using at least a portion of the measurement data from the scan to establish an orientation of a plane of the sample holder and thereby establishing any misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis; and

    interpreting at least a portion of the measurement data from the scan using the orientation of the plane of the sample holder in order to correct the measurement data for any established misalignment or non-colinearity of the sample holder with respect to the rotatable or longitudinal axis.

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