MEMS sensor suite on a chip
First Claim
1. A monolithically integrated micro-electromechanical sensor suite formed on a semiconductor chip, comprising:
- a silicon-on-insulator accelerometer; and
a humidity sensor monolithically integrated with the silicon-on-insulator accelerometer.wherein the silicon-on-insulator accelerometer and the humidity sensor are commonly fabricated from a shared active silicon layer.
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Abstract
The MEMS Sensor Suite on a Chip provides the capability, monolithically integrated onto one MEMS chip, to sense temperature, humidity, and two axes of acceleration. The device incorporates a MEMS accelerometer, a MEMS humidity sensor, and a MEMS temperature sensor on one chip. These individual devices incorporate proof masses, suspensions, humidity sensitive capacitors, and temperature sensitive resistors (thermistors) all fabricated in a common fabrication process that allows them to be integrated onto one micromachined chip. The device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications. During operation, the sensor suite chip monitors temperature levels, humidity levels, and acceleration levels in two axes. External circuitry allows sensor readout, range selection, and signal processing.
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Citations
13 Claims
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1. A monolithically integrated micro-electromechanical sensor suite formed on a semiconductor chip, comprising:
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a silicon-on-insulator accelerometer; and a humidity sensor monolithically integrated with the silicon-on-insulator accelerometer. wherein the silicon-on-insulator accelerometer and the humidity sensor are commonly fabricated from a shared active silicon layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 13)
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10. A monolithically integrated micro-electromechanical sensor suite formed on a semiconductor chip, comprising:
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a silicon-on-insulator accelerometer; and a chemical sensor monolithically integrated with the silicon-on-insulator accelerometer, wherein the silicon-on-insulator accelerometer and the chemical sensor are commonly fabricated from a shared active silicon layer. - View Dependent Claims (11, 12)
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Specification