Hermetic chamber with electrical feedthroughs
First Claim
1. A device comprising:
- a substrate having first and second sides;
a passage through the substrate from the first side to the second side;
a raised portion of the substrate located on the first side, surrounding the passage and having an outer surface which forms an angle that is less than 90 degrees relative to a plane defined by the surface of the first side and extending away from a center line of the passage; and
a metal layer disposed against the first side of the substrate over the passage; and
wherein a compressive force is exerted on the raised portion that surrounds the passage on the first side of the substrate.
7 Assignments
0 Petitions
Accused Products
Abstract
An exemplary pressure cavity is disclosed that is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The exemplary pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from ambient pressure in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g., intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
46 Citations
11 Claims
-
1. A device comprising:
-
a substrate having first and second sides; a passage through the substrate from the first side to the second side; a raised portion of the substrate located on the first side, surrounding the passage and having an outer surface which forms an angle that is less than 90 degrees relative to a plane defined by the surface of the first side and extending away from a center line of the passage; and a metal layer disposed against the first side of the substrate over the passage; and wherein a compressive force is exerted on the raised portion that surrounds the passage on the first side of the substrate. - View Dependent Claims (2, 3, 4)
-
-
5. A device comprising:
-
a housing having walls defining a chamber, a first one of the walls defining an exterior wall of the housing; a passage through the exterior wall from a first side to a second side; a raised portion of the exterior wall located on the first side of the exterior wall, surrounding the passage and having an outer surface which forms an angle that is less than 90 degrees relative to a plane defined by a surface of the first side and extending away from a center line of the passage; and a metal layer disposed against the first side of the exterior wall and outer surface of the passage; wherein a compressive force is exerted on the raised portion that surrounds the passage on the first side of the exterior wall; and whereby an external electrical device coupled to the metal layer is placed in electrical communication with an interior of the chamber through the passage. - View Dependent Claims (6, 7, 8, 9, 10, 11)
-
Specification