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Apparatus of inspecting defect in semiconductor and method of the same

  • US 7,751,036 B2
  • Filed: 01/06/2009
  • Issued: 07/06/2010
  • Est. Priority Date: 07/20/2005
  • Status: Expired due to Fees
First Claim
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1. Defect inspection apparatus comprising:

  • an illumination unit for illuminating light to an object to be inspected,a detection unit for detecting light scattered from the object to be inspected by the illumination of light from the illumination unita signal processing unit for detecting a defect by processing a detection signal of the scattered light from the object detected by the detection unit, and calculating size of the detected defect, anda display unit for displaying information of a result processed by the signal processing unit,wherein a size calculation accuracy of defects is improved based on an inspection condition that includes an illumination condition, a detection condition, and a size calculation formula that is changed according to a position of the defect on the sample.

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