Micro-actuation element provided with torsion bars
First Claim
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1. A micro-actuation element, comprising:
- a movable unit,a support frame anda coupler for connecting the movable unit and the support frame,the movable unit, the support frame and the coupler being integrally formed in a material substrate with a multi-layer structure comprising a plurality of electroconductive layers and insulation layers arranged between the electroconductive layers, the electroconductive layers including a core conduction layer,the movable unit comprising a first structure originating in the core conduction layer,the frame comprising a second structure originating in the core conduction layer and a third structure originating in an electroconductive layer connected to the core conduction layer via the insulation layer in the material substrate, at least a part of the third structure and a part of the second structure being connected to each other via a conduction plug passing through the insulation layer intervening between the third structure and the second structure,the coupler comprising a plurality of electrically separated torsion bars originating in the core conduction layer and continuously connected to the first structure and the second structure.
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Abstract
The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
9 Citations
17 Claims
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1. A micro-actuation element, comprising:
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a movable unit, a support frame and a coupler for connecting the movable unit and the support frame, the movable unit, the support frame and the coupler being integrally formed in a material substrate with a multi-layer structure comprising a plurality of electroconductive layers and insulation layers arranged between the electroconductive layers, the electroconductive layers including a core conduction layer, the movable unit comprising a first structure originating in the core conduction layer, the frame comprising a second structure originating in the core conduction layer and a third structure originating in an electroconductive layer connected to the core conduction layer via the insulation layer in the material substrate, at least a part of the third structure and a part of the second structure being connected to each other via a conduction plug passing through the insulation layer intervening between the third structure and the second structure, the coupler comprising a plurality of electrically separated torsion bars originating in the core conduction layer and continuously connected to the first structure and the second structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A micro-actuation element, comprising:
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a movable unit; a support frame; and a coupler for connecting the movable unit and the support frame, the movable unit, the support frame and the coupler being integrally formed in a material substrate with a multi-layer structure comprising a plurality of electroconductive layers and insulation layers arranged between the electroconductive layers, the electroconductive layers including a core conduction layer, the movable unit comprising a first structure originating in the core conduction layer, the frame comprising a second structure originating in the core conduction layer, the coupler comprising a plurality of electrically separated torsion bars originating in the core conduction layer and continuously connected to the first structure and the second structure, wherein the coupler includes two torsion bars spaced from each other in a width direction, the two torsion bars having spacing that becomes greater as the bars are closer to the movable unit. - View Dependent Claims (15)
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16. A micro-actuation element comprising a movable unit, a support frame and a coupler for connecting these, the unit, the frame and the coupler being integrally formed in a material substrate having a multi-layer structure that includes a first electroconductive layer, a second electroconductive layer, a third electroconductive layer, a first insulation layer intervening between the first and the second electroconductive layers, and a second insulation layer intervening between the second and the third electroconductive layers,
the movable unit including a first structure originating in the second electroconductive layer, the frame including a second structure originating in the second electroconductive layer, a third structure originating in the first electroconductive layer and a fourth structure originating in the third electroconductive layer, at least a part of the third structure and a part of the fourth structure being connected to each other by a first conduction plug passing through the first insulation layer intervening between the third structure and the second structure, another part of the second structure and at least one part of the fourth structure being connected to each other by a second conduction plug passing through the second insulation layer intervening between the second structure and the fourth structure, the coupler including a plurality of electrically separated torsion bars that originate in the second electroconductive layer and are continuously connected to the first structure and the second structure.
Specification
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Current AssigneeFujitsu Limited
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Original AssigneeFujitsu Limited
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InventorsYamagishi, Fumio, Tsuboi, Osamu, Mizuno, Yoshihiro, Soneda, Hiromitsu, Okuda, Hisao, Ueda, Satoshi, Sawaki, Ippei, Kouma, Norinao
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Primary Examiner(s)Phan; James
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Application NumberUS11/987,899Publication NumberTime in Patent Office944 DaysField of SearchNoneUS Class Current359/224.1CPC Class CodesG02B 26/0841 the reflecting element bein...G02B 26/085 the reflecting means being ...H02N 1/008 Laterally driven motors, e....
