Optical element damping systems

• US 7,751,130 B2
• Filed: 12/07/2006
• Issued: 07/06/2010
• Est. Priority Date: 12/30/2005
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Kreuzer, Justin, Kochersperger, Peter, Roux, Stephen
• Primary Examiner(s): HASAN, MOHAMMED A
• Application Number:
  US11/634,931
• Publication Number:
  US 20070153348A1
• Time in Patent Office: 1,307 Days
• Field of Search: 359811-823, 355/53, 355/72, 355/77, 310/12
• US Class Current: 359/811
• CPC Class Codes: G02B 7/00 Mountings, adjusting means, or light-tight connections, for optical elements
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Claims