Method and apparatus for determining spatial coordinates at a multiplicity of measurement points

• US 7,752,766 B2
• Filed: 05/14/2009
• Issued: 07/13/2010
• Est. Priority Date: 11/17/2006
• Status: Expired due to Fees

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Aubele, Eugen, Ruck, Otto, Grupp, Guenter
• Primary Examiner(s): BENNETT, GEORGE B
• Application Number:
  US12/465,705
• Publication Number:
  US 20090271997A1
• Time in Patent Office: 425 Days
• Field of Search: 335/03, 33556-561
• US Class Current: 33/503
• CPC Class Codes: G01B 21/045 Correction of measurements G01B9/02055 takes precedence
• CPC Class Codes: G01B 5/008 using coordinate measuring machines

Abstract

In order to determine spatial coordinates of a multiplicity of measurement points along a contour of a measurement object, a probe head is provided with a probe element that is movably supported on the probe head. During movement of the probe head along the contour, position measuring values of the probe head and deflections of the probe element relative to the probe head are determined. Spatial coordinates for the measurement points along the contour are determined from the position measuring values and deflections. The probe element is kept in contact with the contour during movement of the probe head by using an actuator to produce a defined contact force. The contact force is set as a function of a differential acceleration of the probe element relative to the probe head.

Claims

1. A method for determining spatial coordinates at a multiplicity of measurement points along a contour of a measurement object, the method comprising the steps of:

providing a probe head comprising a probe element movably supported on the probe head and comprising an actuator capable of setting a preliminary deflection of the probe element relative to the probe head;

moving the probe head relative to the measurement object in a measuring volume;

contacting a first measurement point on the contour with the probe element;

recording first position values and first deflections, the first position values being representative of the position of the probe head in the measuring volume, and the first deflections being representative of the position of the probe element relative to the probe head;

moving the probe head along the contour and recording further position values and further deflections at the multiplicity of measurement points along the contour; and

determining the spatial coordinates as a function of the further position values and the further deflections;

wherein the probe element is held in contact with the contour during the step of moving by producing a defined contact force by means of the actuator; and

wherein the defined contact force is determined as a function of a differential acceleration of the probe element relative to the probe head and, furthermore, as a function of a differential speed of the probe element relative to the probe head.

2. The method of claim 1, wherein the differential acceleration is determined by means of at least one acceleration sensor.

3. The method of claim 1, wherein the differential acceleration is estimated by means of at least one state observer.

4. The method of claim 1, wherein the differential acceleration is determined by twofold differentiation of the further deflections.

5. The method of claim 1, wherein the contact force is periodically determined as a function of the differential acceleration.

6. The method of claim 1, wherein the differential acceleration is filtered in order to obtain a filtered differential acceleration, and wherein the contact force is determined as a function of the filtered differential acceleration.

7. The method of claim 6, wherein the differential acceleration is filtered using a non-recursive filter in order to obtain the filtered differential acceleration.

8. The method of claim 7, wherein the non-recursive filter has a largely rectangular weighting.

9. The method of claim 7, wherein the non-recursive filter has a largely triangular weighting.

10. The method of claim 7, wherein the differential acceleration is further filtered using a recursive highpass filter in order to obtain the filtered differential acceleration.

11. An apparatus for determining spatial coordinates at a multiplicity of measurement points along a contour of a measurement object, the apparatus comprising:

a probe head comprising a probe head base, a probe element movably supported relative to the probe head base, and an actuator capable of setting a preliminary deflection of the probe element relative to the probe head base, the probe head being movable relative to the measurement object in a measuring volume;

first position measuring devices for determining position values that are representative of the position of the probe head in the measuring volume;

second position measuring devices for determining deflections that are representative of the position of the probe element relative to the probe head base;

an evaluation and control unit for determining the spatial coordinates as a function of the position values and the deflections; and

a control device configured to hold the probe element in contact with the contour during movement of the probe head by producing a defined contact force by means of the actuator;

wherein the control device is designed to determine the defined contact force as a function of a differential acceleration of the probe element relative to the probe head base and, furthermore, as a function of a differential speed of the probe element relative to the probe head base.

12. A method for determining spatial coordinates of a multiplicity of measurement points in a measurement volume, the method comprising the steps of:

providing a probe head comprising a probe element movably supported on the probe head and an actuator capable of producing a defined contact force when the probe element makes contact with the measurement object;

contacting a first measurement point on the measurement object with the probe element;

moving the probe head along a contour on the measurement object;

recording position values and deflections, with the position values being representative of the positions of the probe head within the measuring volume, and with the deflections being representative of the positions of the probe element relative to the probe head; and

determining the spatial coordinates as a function of the position values and the deflections;

wherein the probe element is held in contact with the measurement object along the contour during the step of moving by producing the defined contact force by means of the actuator; and

wherein the defined contact force is determined as a function of a differential acceleration of the probe element relative to the probe head.

13. The method of claim 12, wherein the contact force is further determined as a function of a deflection speed of the probe element relative to the probe head.

14. The method of claim 12, wherein the deflections are differentiated twice in order to determine the differential acceleration.

15. The method of claim 12, wherein the differential acceleration is filtered in order to obtain a filtered differential acceleration, with the contact force being determined as a function of the filtered differential acceleration.

16. The method of claim 15, wherein the differential acceleration is filtered using a non-recursive filter in order to obtain the filtered differential acceleration.

17. The method of claim 16, wherein the differential acceleration is further filtered using a recursive highpass filter in order to obtain the filtered differential acceleration.

18. A computer program product comprising a storage medium where a program code is stored, the storage medium being designed to interact with an apparatus for determining spatial coordinates along a contour of a measurement object, the apparatus comprising a probe head having a probe head base, a probe element movably supported relative to the probe head base, and an actuator capable of setting a preliminary deflection of the probe element relative to the probe head base, the probe head being movable relative to the measurement object in a measuring volume, the apparatus also comprising first position measuring devices for determining position values that are representative of the position of the probe head in the measuring volume, second position measuring devices for determining deflections that are representative of the position of the probe element relative to the probe head base, an evaluation and control unit for determining the spatial coordinates as a function of the position values and the deflections, and a control device configured to hold the probe element in contact with the contour during movement of the probe head by producing a defined contact force by means of the actuator, with the program code being designed to control the control device such that the defined contact force is determined as a function of a differential acceleration of the probe element relative to the probe head.