Devices for probe microscopy

• US 7,752,898 B2
• Filed: 08/14/2007
• Issued: 07/13/2010
• Est. Priority Date: 10/28/2005
• Status: Expired due to Fees

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, Fahrettin L.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/838,833
• Publication Number:
  US 20080168830A1
• Time in Patent Office: 1,064 Days
• Field of Search: 731/05
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 30/025 Optical microscopes coupled with SPM
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

An atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.

Claims

1. An atomic force microscope sensing structure, comprising:

a. a substrate;

b. a flexible membrane that has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate, a central portion of the membrane and the substrate defining a first gap width therebetween, and a peripheral portion of the membrane and the substrate defining a second gap width therebetween, the first gap width being different from the second gap width; and

c. an actuating element disposed at least adjacent to the first end and the second end and configured to displace the membrane relative to the substrate.

2. The atomic force microscope sensing structure of claim 1, wherein the first gap width is greater than the second gap width.

3. The atomic force microscope sensing structure of claim 1, wherein the actuating element includes a first member and a spaced apart second member, the first member configured to displace the membrane independently from the second member, thereby allowing movement of the central portion of the membrane in a direction that is other than normal to the substrate.

4. The atomic force microscope sensing structure of claim 1, wherein the substrate is transparent and further comprising a diffraction grating disposed on the substrate to facilitate measurement of displacement of the membrane by detecting a diffraction pattern of a light beam reflected off of a surface of the membrane through the diffraction grating.

5. The atomic force microscope sensing structure of claim 1, further comprising a probe tip affixed to the central portion of the membrane.