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Wet processing system, wet processing method and storage medium

  • US 7,752,999 B2
  • Filed: 10/24/2007
  • Issued: 07/13/2010
  • Est. Priority Date: 10/25/2006
  • Status: Active Grant
First Claim
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1. A wet processing system for pouring a process solution supplied by a process solution supply unit through a process solution pouring nozzle onto a surface of a substrate held substantially horizontally by a substrate holding device surrounded by a cup to process the surface by a wet process, said wet processing system comprising:

  • a nozzle bath for holding process solution pouring nozzles thereon at a home position;

    a nozzle carrying mechanism for carrying the process solution pouring nozzles between the home position on the nozzle bath and a position above the substrate held by the substrate holding device;

    an image pickup means for taking a picture of tips of the process solution pouring nozzles while the process solution pouring nozzles are being carried by the nozzle carrying mechanism;

    a decision means for deciding whether or not a globule of the process solution is in a drippy state, in which the globule of the process solution protrudes down from a tip of a process solution pouring nozzle prior to being discharged, and whether or not the globule of the process solution is in a dripping state, in which the process solution has dripped off a tip of a process solution pouring nozzle, on the basis of image data provided by the image pickup means; and

    a control means for making the process solution supply unit and/or the nozzle carrying mechanism execute a drip preventing operation to cope with a drippy state where a globule of the process solution is drippy or a dripping state where a globule of the process solution is dripping when the decision means decides that the globule of the process solution is in the drippy or the dripping state.

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