Method of fabricating the display device

• US 7,753,751 B2
• Filed: 09/14/2005
• Issued: 07/13/2010
• Est. Priority Date: 09/29/2004
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): MACCHIAROLO, PETER J
• Application Number:
  US11/224,960
• Publication Number:
  US 20080018229A1
• Time in Patent Office: 1,763 Days
• Field of Search: 445/24, 313/506
• US Class Current: 445/24
• CPC Class Codes: H01L 27/1222 with a particular composition, shape or crystalline structure of the active layer
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 27/153 in a repetitive configuration, e.g. LED bars
• CPC Class Codes: H01L 29/78675 with normal-type structure, e.g. with top gate
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/8428 Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 59/8723 Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
• CPC Class Codes: H10K 59/874 including getter material or desiccant
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 77/111 Flexible substrates
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product

Abstract

It is an object of the invention to provide a technique to manufacture a display device with high image quality and high reliability at low cost with high yield. The invention has spacers over a pixel electrode layer in a pixel region and over an insulating layer functioning as a partition which covers the periphery of the pixel electrode layer. When forming a light emitting material over a pixel electrode layer, a mask for selective formation is supported by the spacers, thereby preventing the mask from contacting the pixel electrode layer due to a twist and deflection thereof. Accordingly, such damage as a crack by the mask does not occur in the pixel electrode layer. Thus, the pixel electrode layer does not have a defect in shapes, thereby a display device which performs a high resolution display with high reliability can be manufactured.

Claims

1. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer, and forming a first spacer over the first electrode layer by a same step;

forming a second spacer over the insulating layer after forming the insulating layer and the first spacer;

forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

2. The method for manufacturing a display device according to claim 1, further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

3. The method for manufacturing a display device according to claim 2, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

4. The method for manufacturing a display device according to claim 1, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.

5. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer, and forming a first spacer over the first electrode layer by a same step;

forming a second spacer over the insulating layer after forming the insulating layer and the first spacer;

providing a mask in contact with the second spacer, and selectively forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

6. The method for manufacturing a display device according to claim 5, further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

7. The method for manufacturing a display device according to claim 6, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

8. The method for manufacturing a display device according to claim 5, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.

9. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer;

forming a first spacer over the first electrode layer, and forming a second spacer over the insulating layer by a same step after forming the insulating layer;

forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

10. The method for manufacturing a display device according to claim 9, further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

11. The method for manufacturing a display device according to claim 10, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

12. The method for manufacturing a display device according to claim 9, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.

13. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer;

forming an insulating film over the first electrode layer and the insulating layer;

patterning the insulating film, to form a first spacer over the first electrode layer and to form a second spacer over the insulating layer;

forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

14. The method for manufacturing a display device according to claim 13, further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

15. The method for manufacturing a display device according to claim 14, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

16. The method for manufacturing a display device according to claim 13, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.

17. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer;

forming a first spacer over the first electrode layer, and forming a second spacer over the insulating layer by a same step after forming the insulating layer;

providing a mask in contact with the second spacer, and selectively forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

18. The method for manufacturing a display device according to claim 17, further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

19. The method for manufacturing a display device according to claim 18, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

20. The method for manufacturing a display device according to claim 17, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.

21. A method for manufacturing a display device, comprising:

forming a first electrode layer;

forming an insulating layer covering an end portion of the first electrode layer;

forming a first spacer over the first electrode layer;

forming a second spacer over the insulating layer;

forming an electroluminescent layer including a light emitting layer over the first electrode layer and the first spacer so that the electroluminescent layer entirely covers the first spacer; and

forming a second electrode layer over the electroluminescent layer including the light emitting layer,

wherein the light emitting layer is configured to emit monochromatic light or white light.

22. The method for manufacturing a display device according to claim 21 further comprising:

forming a gate electrode layer;

forming a gate insulating layer over the gate electrode layer;

forming a semiconductor layer over the gate insulating layer; and

forming a source electrode layer and a drain electrode layer which are electrically connected to the first electrode layer over the semiconductor layer.

23. The method for manufacturing a display device according to claim 22, wherein each of the gate electrode layer, the source electrode layer and the drain electrode layer is formed by a droplet discharging method.

24. The method for manufacturing a display device according to claim 21, wherein a color of the monochromatic light is one selected from the group consisting of red, green, and blue.