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Method and apparatus for preventing instabilities in radio-frequency plasma processing

  • US 7,755,300 B2
  • Filed: 10/31/2006
  • Issued: 07/13/2010
  • Est. Priority Date: 09/22/2003
  • Status: Active Grant
First Claim
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1. An RF plasma generator, comprising:

  • a power source;

    a partial resonant inverter receiving a power form the power source, the partial resonant inverter providing a constant output power controlled by varying at least one of input voltage or switching frequency, wherein the partial resonant inverter includes a first circuit for converting the voltage from the power source to a desired voltage and a second circuit for maintaining the desired voltage at a constant power level; and

    a RF generator receiving the constant power from the partial resonant inverter.

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