Method and apparatus for preventing instabilities in radio-frequency plasma processing

• US 7,755,300 B2
• Filed: 10/31/2006
• Issued: 07/13/2010
• Est. Priority Date: 09/22/2003
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Millner, Alan R., Kishinevsky, Michael, Bystryak, Ilya
• Primary Examiner(s): VO, TUYET THI
• Application Number:
  US11/554,996
• Publication Number:
  US 20070075654A1
• Time in Patent Office: 1,351 Days
• Field of Search: 315/247, 315/346, 315274-289, 315/291, 315/297, 315307-311, 315/209.R, 315/224, 315/225
• US Class Current: 315/291
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up 1 MHz and above. The apparatus includes a power source, a power converter receiving power from the source, the power converter providing a constant output power controlled by varying at least one of input voltage or switching frequency, and an RF generator receiving constant power from the power converter.

Claims

1. An RF plasma generator, comprising:

a power source;

a partial resonant inverter receiving a power form the power source, the partial resonant inverter providing a constant output power controlled by varying at least one of input voltage or switching frequency, wherein the partial resonant inverter includes a first circuit for converting the voltage from the power source to a desired voltage and a second circuit for maintaining the desired voltage at a constant power level; and

a RF generator receiving the constant power from the partial resonant inverter.

2. The RF plasma generator of claim 1, wherein the first circuit includes plural switches and plural diodes for converting the voltage from the power source to a desired voltage.

3. The RF plasma generator of claim 1, wherein the RF generator energizes a plasma load.

4. The RF plasma generator of claim 1, further comprising a matching circuit coupled between the RF generator and the plasma load.

5. The RF plasma generator of claim 1, wherein the second circuit includes:

a resistive load;

an inductor coupled to the resistive load; and

a capacitor coupled to the inductor, the capacitor periodically charged to an input voltage level and discharged when capacitor current is passed through the resistive load maintaining the desired voltage at a constant power level.

6. The RF plasma generator of claim 5, wherein the inductor ensures the capacitor is fully charged and discharged.

7. A method for delivering constant power to a plasma load, comprising:

receiving power from a power supply;

converting the power received from the power supply to a desired power level, that is controlled by varying at least one of input voltage or switching frequency, with a partial resonant inverter, wherein converting includes converting the voltage from the power source to a desired voltage through a first circuit and maintaining the desired voltage at a constant power level through a second circuit; and

delivering the constant power to an RF generator to energize the plasma load.

8. The method of claim 7, wherein the first circuit includes plural switches and plural diodes for converting the voltage from the power source to a desired voltage.

9. The method of claim 7, wherein the second circuit includes:

a resistive load;

an inductor coupled to the resistive load; and

a capacitor coupled to the inductor, the capacitor periodically charged to an input voltage level and discharged when capacitor current is passed through the resistive load maintaining the desired voltage at a constant power level.

10. The method of claim 9, the inductor ensuring the capacitor is fully charged and discharged.

11. A system for delivering constant power to a plasma load, comprising:

means for receiving power from a power supply;

means for converting the power received from the power supply to a desired power level that is controlled by varying at least one of input voltage or switching frequency, wherein, the means for converting the power includes a first circuit for converting the voltage from the power source to a desired voltage and a second circuit for maintaining the desired voltage at a constant power level; and

a RF generator for receiving the constant power from the means for converting the power and for delivering the constant power to energize the plasma load.