Test apparatus, probe card, and test method
First Claim
1. A test apparatus for testing a device under test, comprisinga plurality of drivers that respectively output a plurality of test signals;
- a plurality of probe pins that are provided in a one-to-one correspondence with the plurality of drivers, each of the plurality of probe pins having a connection portion that is capable of receiving a signal output from a corresponding one of the drivers and a top end portion that is capable of being either electrically connected to a terminal of the device under test or electrically open; and
a processing section that causes the plurality of drivers to respectively output a plurality of adjustment signals, measures reflected waves of the plurality of adjustment signals from the top end portions of the plurality of probe pins when the top end portions are electrically open, and adjusts timings at which the plurality of drivers output the plurality of test signals with reference to a result of the measurement of the reflected waves, whereinthe top end portions of two or more of the plurality of probe pins are capable of being electrically connected to the same terminal of the device under test, andwhen the top end portions of the two or more of the plurality of probe pins are electrically connected to the same terminal, the plurality of drivers respectively output the plurality of test signals at the adjusted timings such that the plurality of test signals through the two or more of the plurality of probe pins are combined into a multiple-valued signal at the same terminal.
2 Assignments
0 Petitions
Accused Products
Abstract
There is provided a test apparatus for testing a device under test. The test apparatus includes a plurality of drivers that respectively output a plurality of test signals to a same terminal of the device under test so as to supply, to the same terminal of the device under test, a multiple-valued signal that is generated by combining together the plurality of test signals, and a plurality of probe pins that are provided in a one-to-one correspondence with the plurality of drivers. Here, each of the plurality of probe pins has a top end portion to be electrically connected to the same terminal of the device under test so as to supply a signal output from a corresponding one of the plurality of drivers to the same terminal of the device under test while the test apparatus is testing the device under test, and the top end portion of each probe pin is kept electrically open while the test apparatus is not testing the device under test.
7 Citations
6 Claims
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1. A test apparatus for testing a device under test, comprising
a plurality of drivers that respectively output a plurality of test signals; -
a plurality of probe pins that are provided in a one-to-one correspondence with the plurality of drivers, each of the plurality of probe pins having a connection portion that is capable of receiving a signal output from a corresponding one of the drivers and a top end portion that is capable of being either electrically connected to a terminal of the device under test or electrically open; and a processing section that causes the plurality of drivers to respectively output a plurality of adjustment signals, measures reflected waves of the plurality of adjustment signals from the top end portions of the plurality of probe pins when the top end portions are electrically open, and adjusts timings at which the plurality of drivers output the plurality of test signals with reference to a result of the measurement of the reflected waves, wherein the top end portions of two or more of the plurality of probe pins are capable of being electrically connected to the same terminal of the device under test, and when the top end portions of the two or more of the plurality of probe pins are electrically connected to the same terminal, the plurality of drivers respectively output the plurality of test signals at the adjusted timings such that the plurality of test signals through the two or more of the plurality of probe pins are combined into a multiple-valued signal at the same terminal. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification