Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry

• US 7,755,764 B2
• Filed: 01/24/2008
• Issued: 07/13/2010
• Est. Priority Date: 01/26/2007
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Krishnan, Shankar, Kwak, Hidong
• Primary Examiner(s): Toatley, Jr.; Gregory J
• Assistant Examiner(s): ALLI, IYABO
• Application Number:
  US12/019,592
• Publication Number:
  US 20080180698A1
• Time in Patent Office: 901 Days
• Field of Search: 356/445, 356/630, 356/635, 356/600, 356/455, 356/369, 250/372, 250/373, 250/559.32
• US Class Current: 356/445
• CPC Class Codes: G01B 11/0625 with measurement of absorption or reflection
• CPC Class Codes: G01B 11/0633 using one or more discrete wavelengths
• CPC Class Codes: G01B 11/0641 with measurement of polarization
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0224 using polarising or depolarising elements
• CPC Class Codes: G01J 3/0294 Multi-channel spectroscopy
• CPC Class Codes: G01J 3/447 Polarisation spectrometry
• CPC Class Codes: G01N 2021/213 Spectrometric ellipsometry
• CPC Class Codes: G01N 21/211 Ellipsometry optical thickness measurement G01B11/06
• CPC Class Codes: G01N 21/33 using ultraviolet light G01N21/39 takes precedence
• CPC Class Codes: G01N 2201/0233 Gas purge

Abstract

An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

Claims

1. An optical method for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment, comprising:

purging a beam path for the metrology tool with purge gas at a first flow rate;

illuminating a surface of the sample by a beam of source radiation, the beam comprising at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in a ultraviolet-visible (UV-Vis) range; and

adjusting a flow rate of a purge gas between the first flow rate for metrology measurements made when the source radiation is in the VUV range and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis range.

2. The method of claim 1, wherein adjusting the flow rate of the purge gas includes lowering the flow rate so that the second flow rate is lower than the first flow rate.

3. The method of claim 2, wherein adjusting the flow rate of the purge gas includes monitoring an effect of the flow rate on an Airborne Molecular Contaminants (AMC) layer on a surface of the sample using measurements taken with the metrology tool.

4. The method of claim 3 wherein adjusting the flow rate includes varying the flow rate in a manner that stabilizes a thickness of AMC layer.

5. The method of claim 4 wherein adjusting the flow rate includes monitoring a precision of the metrology measurements and varying the flow rate in a manner that optimizes a precision of measurements taken with the metrology tool using source radiation in the UV-Vis range.

6. The method of claim 1, wherein the metrology tool is a spectroscopic ellipsometer, single-wavelength ellipsometer, spectroscopic reflectometer or single-wavelength reflectometer.

7. The method of claim 1, wherein adjusting of a flow rate of the purge gas includes increasing the flow rate of the purge gas for a metrology tool measurement using source radiation in the VUV spectral region after a measurement taken with the metrology tool using source radiation in the UV-Vis region, whereby the first flow rate is greater than the second flow rate.

8. The method of claim 7 wherein adjusting of a flow rate of the purge gas includes monitoring a VUV signal measured with the metrology tool and optimizing a recovery time of the VUV signal measured with the metrology tool.

9. The method of claim 8 wherein the recovery time is about 60 seconds or less.

10. An optical system for measuring characteristics of a samples using a broadband metrology tool in a purged gas flow environment, comprising:

a light source configured to supply a beam of source radiation having at least one wavelength component in a VUV range and/or at least one wavelength component in a UV-Vis range;

illumination optics adapted to illuminate a surface of the sample with the beam source of radiation;

collection optics collecting signal radiation generated by interaction of the beam source radiation with the surface of the sample;

a detector adapted to provide at least one output signal in response to the signal radiation collected from the collection optics, wherein the signal is related to a property of the surface of the sample;

a purge gas source configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector; and

a controller operably coupled to the detector and the purge gas source, wherein the controller is configured to control a flow rate of the purged gas flow in response to the output signal from the detector by adjusting a flow rate of the purge gas between a first flow rate for metrology measurements made when the source radiation is in the VUV range and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis range.

11. The system of claim 10 wherein the controller includes an interface unit that facilitates interaction between the detector, the purge gas source and the controller.

12. The system of claim 11, wherein the controller includes a processor and a system memory.

13. The system of claim 10, wherein the illumination optics comprises a polarizer.

14. The system of claim 10, wherein the collection optics comprises an analyzer.

15. The system of claim 10 wherein the detector is a spectroscopic ellipsometer or single-wavelength ellipsometer.

16. The system of claim 10 wherein the detector is a spectroscopic reflectometer or single-wavelength reflectometer.

17. The system of claim 10 wherein the purge gas does not substantially absorb VUV radiation.

18. The system of claim 17 wherein the purge gas is selected from the group of nitrogen, helium, argon, neon and other inert gases.

19. The system of claim 18, wherein the purge gas source includes a gas manifold coupled to two or more of the light source, illumination optics, sample, collection optics and/or detector through separate gas lines, each gas line having a valve operably coupled to the controller, whereby the controller is configured to control separate flows of purge gas to two or more of the light source, illumination optics, sample, collection optics and/or detector.

20. The system of claim 10, wherein the controller is operably coupled to the light source, wherein the controller is configured to

purge a beam path for the metrology tool with purge gas at a first flow rate;

illuminate a surface of the sample by a beam of source radiation, the beam comprising at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in a ultraviolet-visible (UV-Vis) range; and

adjust the flow rate of the purge gas between the first flow rate for metrology measurements made when the source radiation is in the VUV range and the second flow rate for metrology measurements made when the source radiation is in the UV-Vis range.