Apparatus for and a method of determining a characteristic of a layer or layers
First Claim
1. Apparatus for determining information relating to a sample layer structure, the apparatus comprising:
- a beam splitter configured to direct light along a sample path towards a region of a surface of a sample and along a reference path towards a reference surface such that light reflected by the region of the sample surface and light reflected by the reference surface interfere;
a mover configured to effect movement of at least one of the sample and the reference surface so as to effect relative movement along a measurement scan path between the sample and the reference surface;
a sensing device configured to sense light representing the interference fringes produced by a sample surface region during relative movement along the measurement scan path;
a controller configured to carry out a measurement operation by causing the mover to effect relative movement while the sensing device senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface during the relative movement; and
a data processor configured to receive and process first intensity data comprising a first series of intensity values resulting from a measurement operation on a first sample surface area having a layer structure and second intensity data comprising a second series of intensity values resulting from a measurement operation on a characterised second sample surface area, the data processor comprising;
a frequency transform ratio determiner configured to determine a ratio between frequency transformed first intensity data and frequency transformed second intensity data; and
a data fitter configured to fit a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the ratio determined by the ratio determiner by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure.
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Accused Products
Abstract
In respective measurement operations on a first sample surface area having a layer structure (81) and a characterized second sample surface area (82), light reflected by the region of the sample surface and the reference surface interfere and a sensing device (10) senses light intensity representing interference fringes at intervals during the relative movement along a measurement scan path to provide first intensity data in the form of a first series of intensity values resulting from a measurement operation on the first sample surface area and second intensity data in the form of a second series of intensity values resulting from a measurement operation on the second sample surface area. A layer structure determiner (100) determines a frequency transform ratio corresponding to a ratio between the first and second intensity data and fits a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the determined ratio by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure.
43 Citations
54 Claims
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1. Apparatus for determining information relating to a sample layer structure, the apparatus comprising:
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a beam splitter configured to direct light along a sample path towards a region of a surface of a sample and along a reference path towards a reference surface such that light reflected by the region of the sample surface and light reflected by the reference surface interfere; a mover configured to effect movement of at least one of the sample and the reference surface so as to effect relative movement along a measurement scan path between the sample and the reference surface; a sensing device configured to sense light representing the interference fringes produced by a sample surface region during relative movement along the measurement scan path; a controller configured to carry out a measurement operation by causing the mover to effect relative movement while the sensing device senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface during the relative movement; and a data processor configured to receive and process first intensity data comprising a first series of intensity values resulting from a measurement operation on a first sample surface area having a layer structure and second intensity data comprising a second series of intensity values resulting from a measurement operation on a characterised second sample surface area, the data processor comprising; a frequency transform ratio determiner configured to determine a ratio between frequency transformed first intensity data and frequency transformed second intensity data; and a data fitter configured to fit a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the ratio determined by the ratio determiner by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. Data processing apparatus for processing series of intensity values provided by a coherence scanning interferometer, the data processing apparatus being configured to receive a first series of intensity values resulting from a measurement operation on a first sample surface area having a layer structure and a second series of intensity values resulting from a measurement operation on a characterised second sample surface area and the data processor comprising:
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a frequency transform ratio determiner configured to determine a ratio between frequency transformed first intensity data and frequency transformed second intensity data; and a data fitter configured to fit variable model parameters related to characteristics of a layer structure of a layer structure model to the determined ratio to obtain for the model parameters values representing the characteristics of the sample layer structure. - View Dependent Claims (22)
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23. A method of determining information relating to a sample layer structure, the method comprising the steps of:
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carrying out respective measurement operations on a first sample surface area having a layer structure and a characterised second sample surface area -by, in each measurement operation, directing light along a sample path towards a region of the sample surface and along a reference path towards a reference surface such that light reflected by the region of the sample surface and light reflected by the reference surface interfere and causing movement of at least one of the sample and the reference surface so as to cause relative movement therebetween along a measurement scan path between the sample and the reference surface while a sensing device senses light intensity representing interference fringes produced by the sample surface region at intervals during the relative movement to provide first intensity data comprising a first series of intensity values resulting from a measurement operation on the first sample surface area and second intensity data comprising a second series of intensity values resulting from a measurement operation on the second sample surface area; frequency transforming the first intensity data to produce frequency transformed first intensity data, frequency transforming the second intensity data to produce frequency transformed second intensity data and determining a ratio between the frequency transformed first intensity data and the frequency transformed second intensity data to form a frequency transform ratio; and fitting a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the determined ratio by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 47, 48, 49, 50, 51, 53)
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44. A method of processing series of intensity values provided by a coherence scanning interferometer, the method comprising the steps of receiving first intensity data comprising a first series of intensity values resulting from a measurement operation on a first sample surface area having a layer structure and second intensity data comprising a second series of intensity values resulting from a measurement operation on a characterised second sample surface area and the data processing comprising:
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frequency transforming the first intensity data to produce frequency transformed first intensity data; frequency transforming the second intensity data to produce frequency transformed second intensity data; determining a ratio between the frequency transformed first intensity data and the frequency transformed second intensity data; and fitting variable model parameters related to characteristics of a layer structure of a layer structure model to the determined ratio to obtain for the model parameters values representing the characteristics of the sample layer structure. - View Dependent Claims (45, 52, 54)
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46. Apparatus for determining information relating to a sample layer structure, the apparatus comprising:
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light directing means for directing light along a sample path towards a region of a surface of a sample and along a reference path towards a reference surface such that light reflected by the region of the sample surface and light reflected by the reference surface interfere; moving means for effecting movement of at least one of the sample and the reference surface so as to effect relative movement therebetween along a measurement scan path between the sample and the reference surface; sensing means for sensing light representing the interference fringes produced by a sample surface region during relative movement along the measurement scan path; control means for carrying out a measurement operation by causing the moving means to effect relative movement while the sensing means senses light intensity at intervals to provide a series of intensity values representing interference fringes produced by a region of a sample surface during the relative movement; and data processing means for receiving and processing first intensity data comprising a first series of intensity values resulting from a measurement operation on a first sample surface area having a layer structure and second intensity data comprising a second series of intensity values resulting from a measurement operation on a characterised second sample surface area, the data processing means comprising; frequency transform ratio determining means for determining a ratio between frequency transformed first intensity data and frequency transformed second intensity data; and data fitting means for fitting a layer structure model having variable model parameters related to the layer thicknesses and refractive indices of the layers of a layer structure to the ratio determined by the ratio determining means by adjusting the model parameters, thereby obtaining for the model parameters values representing the layer thicknesses and refractive indices of the layers of the sample layer structure.
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Specification