LED with substrate modifications for enhanced light extraction and method of making same
First Claim
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1. A light emitting diode (LED) comprising:
- a conductive substrate having a first surface and a second surface, a portion of the first surface having a moth-eye morphology formed in said substrate by a maskless etching process;
a light emission region on the second surface, the light emission region including an active layer between first and second oppositely doped layers;
a first contact on the first surface and in contact with one of the first or second doped layers;
a second contact in contact with the other of the first or second doped layers; and
a current spreading structure in contact with the portion of the first surface having the moth-eye morphology and the first contact.
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Abstract
The surface morphology of an LED light emitting surface is changed by applying processes, such as a reactive ion etch (RIE) process to the light emitting surface. In one embodiment, the changed surface morphology takes the form of a moth-eye surface. The surface morphology created by the RIE process may be emulated using different combinations of non-RIE processes such as grit sanding and deposition of a roughened layer of material or particles followed by dry etching.
97 Citations
9 Claims
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1. A light emitting diode (LED) comprising:
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a conductive substrate having a first surface and a second surface, a portion of the first surface having a moth-eye morphology formed in said substrate by a maskless etching process; a light emission region on the second surface, the light emission region including an active layer between first and second oppositely doped layers; a first contact on the first surface and in contact with one of the first or second doped layers; a second contact in contact with the other of the first or second doped layers; and a current spreading structure in contact with the portion of the first surface having the moth-eye morphology and the first contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A light emitting diode (LED) comprising:
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a conductive substrate having a nonporous first surface and a second surface, a portion of the first surface having a moth-eye morphology formed in said substrate by a maskless etching process; a light emission region on the second surface, the light emission region including an active layer between first and second oppositely doped layers; a first contact on the portion of the first surface having the moth-eye morphology and in contact with one of the first or second doped layers; and a second contact in contact with the other of the first or second doped layers.
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Specification