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Surface inspection method and surface inspection apparatus

  • US 7,761,246 B2
  • Filed: 01/06/2009
  • Issued: 07/20/2010
  • Est. Priority Date: 07/12/2006
  • Status: Expired due to Fees
First Claim
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1. An optical inspection apparatus for inspecting an object to be inspected, the optical inspection apparatus comprising:

  • a pulse light source;

    a light detection system which detects light from the object and converts the light to an electric signal;

    a conversion system which converts the electric signal to digital data;

    wherein;

    the conversion system is configured to have a sampling interval that is equal to approximately a half-integer times, inclusive of approximately ½

    times, as long as a pulse oscillation repetition period of the pulse light source.

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