Dynamic quantity sensor
First Claim
Patent Images
1. A dynamic quantity sensor comprising:
- a base;
a sensor chip made of a rectangular board having a corner portion, the sensor chip includinga detector having a movable part, which is displaceable when a dynamic quantity is applied thereto, wherein the detector detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part, anda plurality of pads; and
a bump for electrically and mechanically connecting the plurality of pads of the sensor chip and the base, whereinthe corner portion of the sensor chip is released from the base as the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip,the sensor chip has a detector area, in which the detector is disposed, defined by the movable part, andat least one of the plurality of pads is arranged in the detector area of the sensor chip.
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Abstract
A dynamic quantity sensor includes a base, a sensor chip made of a rectangular board having a corner portion, and a bump. The sensor chip includes a detector, and a plurality of pads. The detector has a movable part, which is displaceable when a dynamic quantity is applied thereto, and detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part. The bump connects the plurality of pads of the sensor chip and the base. The corner portion of the sensor chip is released from the base such that the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip.
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Citations
23 Claims
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1. A dynamic quantity sensor comprising:
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a base; a sensor chip made of a rectangular board having a corner portion, the sensor chip including a detector having a movable part, which is displaceable when a dynamic quantity is applied thereto, wherein the detector detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part, and a plurality of pads; and a bump for electrically and mechanically connecting the plurality of pads of the sensor chip and the base, wherein the corner portion of the sensor chip is released from the base as the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip, the sensor chip has a detector area, in which the detector is disposed, defined by the movable part, and at least one of the plurality of pads is arranged in the detector area of the sensor chip. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 21)
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12. A dynamic quantity sensor comprising:
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a base; a sensor chip made of a rectangular board having a corner portion, the sensor chip including a first detector and a second detector, which are symmetrical to each other relative to a first imaginary line for dividing the sensor chip into two equal parts, and a plurality of pads; and a bump for electrically and mechanically connecting the base and the plurality of pads of the sensor chip, wherein each of the first and second detectors has a movable part, which is driven to perform a drive vibration in a first direction approximately perpendicular to the first imaginary line, and which is detected to perform a detection vibration due to a Coliolis force generated in a second direction approximately parallel to the first line when an angular velocity is applied to the movable part, such that the angular velocity is calculated based on a capacitance variation between the movable part and a fixed part opposing to the movable part, some of the plurality of pads are arranged on the first imaginary line, some of the plurality of pads are arranged in the first direction on a secondary imaginary line, thereby detecting the drive vibration or the detection vibration, the corner portion of the sensor chip is released from the base, the sensor chip has a detector area, defined by the movable part of each of the first and second detectors, and at least one of the plurality of pads is arranged in the detector area of the sensor chip. - View Dependent Claims (14, 15, 16, 17, 22)
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13. A dynamic quantity sensor comprising:
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a base; a sensor chip made of a rectangular board having a corner portion, the sensor chip including a detector, which is driven to perform a drive vibration in a first direction, and which is detected to perform a detection vibration due to a Coliolis force generated in a second direction approximately perpendicular to the first direction when an angular velocity is applied to the detector, such that the angular velocity is calculated based on a capacitance variation of the detector, a plurality of pads; and a bump for electrically and mechanically connecting the base and the plurality of pads of the sensor chip, wherein the plurality of pads of the sensor chip is arranged in the first direction or the second direction to be at a location a predetermined distance from the corner portion of the sensor chip, the sensor chip has a detector area, in which the detector is disposed, defined by a movable part of the detector, and at least one of the plurality of pads is arranged in the detector area of the sensor chip. - View Dependent Claims (18, 19, 20, 23)
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Specification