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Dynamic quantity sensor

  • US 7,762,134 B2
  • Filed: 08/28/2007
  • Issued: 07/27/2010
  • Est. Priority Date: 09/20/2006
  • Status: Active Grant
First Claim
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1. A dynamic quantity sensor comprising:

  • a base;

    a sensor chip made of a rectangular board having a corner portion, the sensor chip includinga detector having a movable part, which is displaceable when a dynamic quantity is applied thereto, wherein the detector detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part, anda plurality of pads; and

    a bump for electrically and mechanically connecting the plurality of pads of the sensor chip and the base, whereinthe corner portion of the sensor chip is released from the base as the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip,the sensor chip has a detector area, in which the detector is disposed, defined by the movable part, andat least one of the plurality of pads is arranged in the detector area of the sensor chip.

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