Microscale calorimeter

• US 7,762,719 B2
• Filed: 04/20/2005
• Issued: 07/27/2010
• Est. Priority Date: 04/20/2004
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Fon, Chung-Wah, Roukes, Michael L., Tang, Hongxing, Lee, Wonhee
• Primary Examiner(s): Verbitsky; Gail
• Assistant Examiner(s): Jagan; Mirellys
• Application Number:
  US11/578,675
• Publication Number:
  US 20070286254A1
• Time in Patent Office: 1,924 Days
• Field of Search: 374/31, 422/51
• US Class Current: 374/31
• CPC Class Codes: B01L 3/5027 by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip B01L3/5023 takes precedence; micromixers B01F33/30; microreactors for synthesis B01J19/0093; microcapillary devices in general B81B1/00
• CPC Class Codes: G01K 17/006 Microcalorimeters, e.g. using silicon microstructures

Abstract

Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Claims

1. A thermally isolated microcalorimeter, comprising:

a compartment comprising a plurality of polymer membrane layers located over a substrate, the layers being separated by vacuum or gas filled gaps;

a reagent chamber supported on one of the polymer membrane layers and thermally isolated by the vacuum or gas filled gaps, wherein a calorimeter body comprises at least one membrane in the reagent chamber;

a thermometer in thermal communication with the reagent chamber;

a microfluidic channel in fluid communication with the reagent chamber; and

a microvalve disposed between the microfluidic channel and the reagent chamber.

2. The microcalorimeter of claim 1, wherein the layers of polymer membrane comprise parylene membranes and the microvalve comprises an electrostatic-actuated parylene-based microvalve, and the layers of parylene membrane have a thickness of no more than about 5 μ

M and the gaps have a height of no more than about 10 μ

m.

3. The microcalorimeter of claim 1, further comprising a micropump in fluid communication with the microfluidic channel and adapted to pump fluid through the channel, wherein the compartment, the microfluidic channel, the microvalve and the micropump are all integrated on or in the substrate.

4. The microcalorimeter of claim 1, wherein the reagent chamber has a volume of no more than about 2000 pL.

5. The microcalorimeter of claim 1, wherein the layers of polymer membrane comprise PDMS membranes.

6. A microcalorimeter, comprising:

a polymer membrane comprising a microcalorimeter body; and

a thermometer in thermal communication with the microcalorimeter body, wherein;

the polymer membrane comprises a parylene membrane or a PDMS membrane;

the polymer membrane comprises a surface of a thermally isolated reagent chamber which contacts the thermometer; and

the microcalorimeter further comprises a compartment comprising a plurality of polymer membrane layers located over a substrate, the layers being separated by vacuum or gas filled gaps, such that the reagent chamber is supported on one of the polymer membrane layers and is thermally isolated by the vacuum or gas filled gaps.

7. The microcalorimeter of claim 6, further comprising:

a microfluidic channel in fluid communication with the reagent chamber; and

a microvalve disposed between the microfluidic channel and the reagent chamber.

8. The microcalorimeter of claim 6, wherein the polymer membrane comprises the parylene membrane.

9. The microcalorimeter of claim 6, wherein the polymer membrane comprises the PDMS membrane.

10. A method for taking a calorimetric measurement, comprising:

introducing a reagent into a reagent chamber via a microfluidic channel;

closing a microvalve to isolate the reagent chamber from the microfluidic channel; and

measuring a temperature in the reagent chamber to determine at least one of a heat capacity or an enthalpy of the reagent,

wherein;

the reagent chamber is located between polymer membrane layers which are separated by gas filled or vacuum gaps which isolate the reagent chamber from environment;

the reagent chamber is supported by at least one polymer membrane layer; and

a calorimeter body comprises at least one membrane in the reagent chamber.