Tear-resistant thin film methods of fabrication
First Claim
1. A thin film device having optimum tear resistance, the device comprising a thin film first layer of a material, the first layer having first and second planar sides, the layer having an edge, the first side being formed with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, a thin film second layer having first and second planar sides, the first side of the second layer being bonded to the second side of the first layer, a thin film third layer having first and second planar sides, the first side of the third layer being bonded to the second side of the second layer, and the second side of the third layer being formed with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
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Abstract
A thin film device and fabrication method providing optimum tear resistance. A thin film layer is formed with a first and second of rows of holes. The holes in each row are spaced-apart along an axis which extends along an edge of the layer. The holes in one row are in overlapping relationship with adjacent holes in the other row. The holes have a diameter which is sufficiently large so that an imaginary line extending perpendicular from any location along the edge will intersect at least one hole, thus preventing further propagation of any tears or cracks which start from the edge.
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Citations
15 Claims
- 1. A thin film device having optimum tear resistance, the device comprising a thin film first layer of a material, the first layer having first and second planar sides, the layer having an edge, the first side being formed with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, a thin film second layer having first and second planar sides, the first side of the second layer being bonded to the second side of the first layer, a thin film third layer having first and second planar sides, the first side of the third layer being bonded to the second side of the second layer, and the second side of the third layer being formed with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
- 3. A method of fabricating a thin film device with improved tear resistance comprising the steps of providing a thin film first layer of a material having first and second planar sides and with the layer having an edge, forming the first side being with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, forming a thin film second layer having first and second planar sides, bonding the first side of the second layer to the second side of the first layer, forming a thin film third layer having first and second planar sides, bonding the first side of the third layer to the second side of the second layer, and forming the second side of the third layer with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
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5. A tear-resistant thin film device, the device formed by the combination of three layers, the device comprising:
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a first thin film layer of a shape memory alloy material, the first layer comprising an inner planar surface opposite an outer surface, the outer surface having a plurality raised ribs extending therealong; a second thin film layer of shape memory alloy material bonded to the inner planar surface; and a third thin film layer of shape memory alloy, the third layer comprising an inner planar surface and an outer planar surface, wherein the inner planar surface of the third layer is bonded to the second thin film layer and the outer surface of the third layer comprises a plurality of raised struts which are inclined at an angle with respect to the ribs. - View Dependent Claims (6, 7, 8, 9)
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10. A tear-resistant thin film device comprising:
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a thin film layer comprising a plane of a shape memory alloy material, the thin film layer having a first planar side and a second planar side; a plurality of raised ribs bonded to the first planar side of the thin film layer, wherein the ribs are formed of a shape memory alloy material; and a plurality of raised struts bonded to the second planar side of the thin film layer which are inclined at an angle with respect to the ribs, wherein the struts are formed of a shape memory alloy material; wherein the shape memory material forming the thin film layer is different from the shape memory alloy material forming the ribs and the shape memory alloy material forming the struts. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification