Fuel cell formed in a single layer of monocrystalline silicon and fabrication process

• US 7,763,372 B2
• Filed: 05/12/2006
• Issued: 07/27/2010
• Est. Priority Date: 05/13/2005
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: D'Arrigo, Giuseppe, Coffa, Salvatore
• Primary Examiner(s): Ryan; Patrick
• Assistant Examiner(s): Siddiquee; Muhammad
• Application Number:
  US11/383,088
• Publication Number:
  US 20060255464A1
• Time in Patent Office: 1,537 Days
• Field of Search: 257/758, 429 12- 46
• US Class Current: 257/750
• CPC Class Codes: H01M 2008/1095 Fuel cells with polymeric electrolytes
• CPC Class Codes: H01M 8/1004 characterised by membrane-electrode assemblies [MEA] H01M8/12 takes precedence
• CPC Class Codes: H01M 8/1097 Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
• CPC Class Codes: Y02E 60/50 Fuel cells

Abstract

Fuel cells are formed in a single layer of conductive monocrystalline silicon including a succession of electrically isolated conductive silicon bodies separated by narrow parallel trenches etched through the whole thickness of the silicon layer. Semicells in a back-to-back configuration are formed over etch surfaces of the separation trenches. Each semicell formed on the etch surface of one of the silicon bodies forming an elementary cell in cooperation with an opposite semicell formed on the etch surface of the next silicon body of the succession, is separated by an ion exchange membrane resin filling the separation trench between the opposite semicells forming a solid electrolyte of the elementary cell. Each semicell includes a porous conductive silicon region permeable to fluids, extending for a certain depth from the etch surface of the silicon body, at least partially coated by a non passivable metallic material. Each of the porous and fluid permeable regions communicates with a feed duct of a fuel fluid or of oxygen gas that extends parallel to the etch surface inside the conductive silicon body.

Claims

1. A fuel cell device including a plurality of fuel cells formed in a conductive monocrystalline silicon layer, the device comprising:

a succession of electrically isolated conductive silicon bodies closely separated by etched parallel trenches in the silicon layer to define etched side surfaces of the silicon bodies;

each fuel cell comprising a pair of semicells including a semicell in the etched side surface of one of the silicon bodies in cooperation with an adjacent semicell in the etched side surface of a next silicon body of the succession, each semicell comprising

a porous conductive silicon region extending into the silicon body from the etched side surface thereof,

a non-passivatable metallic material at least partially coating the porous conductive silicon region, and

a fluid feed duct, for at least one of fuel and oxygen, inside the silicon body and extending parallel to the etched side surface thereof, and in communication with the porous conductive silicon region; and

an ion exchange material filling the trenches between the adjacent semicells and defining a solid electrolyte of the fuel cell.

2. The fuel cell device according to claim 1, further comprising catalytic material particles at least between the porous conductive silicon region and said ion exchange material.

3. The fuel cell device according to claim 2, wherein said catalytic material particles are on a surface of said non-passivatable metallic material.

4. The fuel cell device according to claim 2, wherein said catalytic material particles comprise at least one of platinum black, palladium black, iridium black and ruthenium black.

5. The fuel cell device according to claim 4, further comprising a binder for said catalytic material particles and the non-passivatable metallic material over the surface of said porous conductive silicon region.

6. The fuel cell device according to claim 1, wherein the plurality of fuel cells define an array of monopolar fuel cells.

7. The fuel cell device according to claim 1, wherein the plurality of fuel cells define a battery of bipolar fuel cells.