Graphical user interface for presenting multivariate fault contributions
First Claim
1. A method, comprising:
- providing a user interface to illustrate a fault for a sample manufactured by a process containing multiple variables, each of the multiple variables comprises at least two components;
presenting in the user interface the multiple variables, one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis, wherein areas on the user interface where different ones of the one group of components of the multiple variables on the first axis intersect with the different ones of the second group of components of the multiple variables on the second axis are cells;
illustrating, graphically in the user interface, contributions to the fault that are associated with the multiple variables by associating contributions of components in the one group of components of the multiple variables to corresponding components in the second group of components of the multiple variables; and
providing visual indications of fault contributions of components for corresponding cells.
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Abstract
Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.
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Citations
26 Claims
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1. A method, comprising:
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providing a user interface to illustrate a fault for a sample manufactured by a process containing multiple variables, each of the multiple variables comprises at least two components; presenting in the user interface the multiple variables, one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis, wherein areas on the user interface where different ones of the one group of components of the multiple variables on the first axis intersect with the different ones of the second group of components of the multiple variables on the second axis are cells; illustrating, graphically in the user interface, contributions to the fault that are associated with the multiple variables by associating contributions of components in the one group of components of the multiple variables to corresponding components in the second group of components of the multiple variables; and providing visual indications of fault contributions of components for corresponding cells. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An apparatus, comprising:
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means for providing a user interface to illustrate a fault for a sample manufactured by a process containing multiple variables, each of the multiple variables comprises at least two components; means for presenting in the user interface the multiple variables, one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis, wherein areas on the user interface where different ones of the one group of components of the multiple variables on the first axis intersect with the different ones of the second group of components of the multiple variables on the second axis are cells; means for illustrating, graphically in the user interface, contributions to the fault that are associated with the multiple variables by associating contributions of components in the one group of components of the multiple variables to corresponding components in the second group of components of the multiple variables; and means for providing visual indications of fault contributions of components for corresponding cells. - View Dependent Claims (19, 20, 21, 22)
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23. A machine-accessible medium that provides instructions that, if executed by a machine, will cause the machine to perform operations, comprising:
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providing a user interface to illustrate a fault for a sample manufactured by a process containing multiple variables, each of the multiple variables comprises at least two components; presenting in the user interface the multiple variables, one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis, wherein areas on the user interface where different ones of the one group of components of the multiple variables on the first axis intersect with the different ones of the second group of components of the multiple variable on the second axis are cells; illustrating, graphically in the user interface, contributions to the fault that are associated with the multiple variables by associating contributions of components in the one group of components of the multiple variables to corresponding components in the second group of components of the multiple variables; and providing visual indications of fault contributions of component for corresponding cells. - View Dependent Claims (24, 25)
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26. A system comprising:
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a database to store data pertaining to faults; and a GUI generator, coupled with the database, to provide a user interface to illustrate a fault for a sample manufactured by a process containing multiple variables, each of the multiple variables comprises at least two components, present in the user interface the multiple variables, one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis, wherein areas on the user interface where different ones of the group of components of the multiple variables on the first axis intersect with the different ones of the second group of components of the multiple variables on the second axis are cells, illustrate, graphically in the user interface, contributions to the fault that are associated with the multiple variables by associating contributions of components in the one group of components of the multiple variables to corresponding components in the second group of components of the multiple variables, and providing visual indications of fault contributions of components for corresponding cells.
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Specification