Multiple die wafers having increased reliability and methods of increasing reliability in same

• US 7,767,473 B2
• Filed: 11/17/2008
• Issued: 08/03/2010
• Est. Priority Date: 09/14/2004
• Status: Active Grant

• Current Assignee: Atmel Corporation (Microchip Technology Incorporated)
• Original Assignee: Atmel Corporation (Microchip Technology Incorporated)
• Inventors: Suciu, Paul I., Marcus, Kristopher R., Friedberg, Charles B.
• Primary Examiner(s): Nguyen; Ha Tran T
• Assistant Examiner(s): BROWN, VALERIE N
• Application Number:
  US12/313,150
• Publication Number:
  US 20090166898A1
• Time in Patent Office: 624 Days
• Field of Search: 702 58- 59, 324/765
• US Class Current: 438/15
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method increases a reliability of packaged semiconductor integrated circuit dice by identifying one or more dice on a wafer having failed an electrical test. One or more failed dice are added to a character map. A first tier of buffer dice is added to the initial character map adjacent to each die on the character map. Both the failed dice and the first tier of buffer dice are indicated or marked, such as by inking, thereby indicating dice not requiring packaging. A wafer may include multiple die, with die corresponding to the die in the character map being marked. The marked die thus include die that have failed an electrical test plus die that may be likely to fail in the future due to their proximity to the failed die.

Claims

1. A method to increase a reliability of packaged semiconductor integrated circuit dice comprising:

identifying one or more dice on a wafer having failed an electrical test;

adding the one or more failed dice to a character map;

adding a first tier of buffer dice to the initial character map adjacent to each die on the character map, wherein the adding the first tier of buffer dice comprises

identifying a core die comprising an electrically malfunctioning die surrounded by a plurality of at least seven other electrically malfunctioning dice to form a cluster; and

locating electrically malfunctioning die on an outer edge of the cluster of malfunctioning die around the core die; and

indicating both the failed dice and the first tier of buffer dice, wherein dice not requiring packages are indicated.

2. The method of claim 1 wherein the character map comprises a weighted character map.

3. The method of claim 1 wherein the first tier of buffer dice are located diagonally adjacent to the one or more failed dice.

4. The method of claim 3 further comprising adding a second tier of buffer dice to the character map edgewise adjacent to each of the first tier of buffer dice on the character map.

5. The method of claim 4 wherein the second tier of buffer dice are located adjacent to an edge of the first tier of buffer dice.

6. The method of claim 4 further comprising adding a third tier of buffer dice to the character map adjacent to each of the second tier of buffer dice on the character map.

7. The method of claim 6 wherein the third tier of buffer dice are located adjacent to an edge of the second tier of buffer dice.

8. The method of claim 6 further comprising adding a fourth tier of buffer dice to the character map adjacent to each of the third tier of buffer dice on the weighted character map.

9. The method of claim 8 wherein the fourth tier of buffer dice are located adjacent to an edge of the third tier of buffer dice.

10. The method of claim 8 wherein the first tier of buffer dice are located diagonally adjacent to the third tier of buffer dice.

11. The method of claim 1 wherein indicating both the failed dice and the first tier of buffer dice comprises applying ink to the die in the character map.

13. The method of claim 11 wherein adding a variable width exclusion zone of buffer dice comprises:

identifying a core die, the core die being an electrically malfunctioning die surrounded by a plurality of other electrically malfunctioning dice forming a cluster;

locating electrically malfunctioning die on an outer edge of a cluster of malfunctioning die around the core die; and

adding one or more tiers of buffer dice successively adjacent to the outer edge of the cluster.

14. The method of claim 13 wherein the plurality of other electrically malfunctioning dice comprises at least seven in order to form a cluster.

15. The method of claim 13 wherein a first tier of buffer dice are located diagonally adjacent to the one or more failed dice.

16. The method of claim 13 wherein indicating dice as not requiring packaging comprises applying ink to the die in the character map.

12. A method to increase a reliability of packaged semiconductor integrated circuit dice, the method comprising:

identifying one or more dice on a wafer having failed an electrical test;

adding the one or more failed dice to a character map;

adding a variable width exclusion zone of buffer dice to the character map adjacent to each die on the character map; and

indicating dice in the character map as not requiring packaging.

17. A multiple die wafer comprising:

a plurality of marked die, wherein the marked die are selected by a character map formed by;

identifying one or more dice on a wafer having failed an electrical test;

adding the one or more failed dice to the character map; and

adding a variable width exclusion zone of buffer dice to the character map adjacent to each die on the character map.

18. A multiple die wafer comprising:

a plurality of marked die, wherein the marked die are selected by a character map formed by;

identifying one or more dice on a wafer having failed an electrical test;

adding the one or more failed dice to a character map; and

adding a first tier of buffer dice to the initial character map adjacent to each die on the character map.