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Semiconductor device, manufacturing method thereof, and manufacturing method of antenna

  • US 7,767,516 B2
  • Filed: 05/29/2006
  • Issued: 08/03/2010
  • Est. Priority Date: 05/31/2005
  • Status: Active Grant
First Claim
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1. A manufacturing method of a semiconductor device comprising:

  • forming an element group having a transistor over a substrate; and

    pushing out a paste including conductive particles from a first opening of a screen printing plate to form a first conductive film over the element group,subsequently pushing out the paste including the conductive particles from a second opening of the screen printing plate to form a second conductive film functioning as an antenna,wherein the first conductive film is formed to be electrically insulated from the transistor; and

    wherein the second conductive film is formed to be electrically connected to the transistor.

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